公开(公告)号：US20020129857A1

公开(公告)日：2002-09-19

申请号：US10043761

申请日：2002-01-10

Applicant: Institute of High Performance Computing

Inventor： Diao Xu ,  Lun Sheng Pan ,  Teng Yong NG ,  Khin Yong Lam

IPC: F16K031/02

CPC classification number: F16K99/0001 ,  F15C5/00 ,  F16K99/0005 ,  F16K99/0034 ,  F16K99/0051 ,  F16K2099/008 ,  F16K2099/0092 ,  H02N1/006 ,  Y10T137/86718 ,  Y10T137/86759

Abstract: This invention relates to an electrostatically operated, normally closed micromachined flow-through microvalve device. The device comprises a stationary valve plate layer and a movable valve plate layer, the latter including an electrode plate such that it is deflectable by electrostatic forces under an applied voltage, and having a plurality of movable valve elements, each valve element moving with a degree of independence from the remaining valve elements. Application of a voltage results in deflection of the movable valve elements, the order of deflection depending on the relative magnitude of the electrostatic force experienced by the respective associated portion of the movable valve plate layer. This can be prescribed by the geometry of the device, and a preferred example provides a different separation between different portions of the movable valve plate layer and a further electrode plate in a device base plate layer. The invention minimizes the voltage required to open a normally closed valve in a high-pressure fluid environment, whilst ensuring relatively high flow rates through the microvalve once opened.

Abstract translation: 本发明涉及静电操作的常闭微加工流通微型阀装置。 该装置包括固定阀板层和可移动阀板层，后者包括电极板，使得其在施加电压下由静电力偏转，并具有多个可动阀元件，每个阀元件以一定程度移动 独立于其余的阀门元件。 施加电压导致可移动阀元件的偏转，其偏转次数取决于可移动阀板层的各个相关部分所经受的静电力的相对大小。 这可以通过装置的几何形状来规定，并且优选实例提供可移动阀板层的不同部分与装置基板层中的另一个电极板之间的不同分离。 本发明使得在高压流体环境中打开常闭阀所需的电压最小化，同时确保一旦打开通过微型阀的相对高的流量。