公开(公告)号：US11696514B2

公开(公告)日：2023-07-04

申请号：US17565106

申请日：2021-12-29

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Dmitri Nikonov ,  Benjamin Buford ,  Kaan Oguz ,  John J. Plombon ,  Ian A. Young

IPC: H10N50/85 ,  H10B61/00 ,  H10N50/80

CPC classification number: H10N50/85 ,  H10B61/22 ,  H10N50/80

Abstract: An apparatus is provided which comprises: a stack comprising a magnetoelectric (ME such as BiFeO3, (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, SmBiFeO3, Cr2O3, etc.) material and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, graphene, etc.); a magnet adjacent to a first portion of the TMD of the stack; a first interconnect adjacent to the magnet; a second interconnect adjacent to the ME material of the stack; and a third interconnect adjacent to a second portion of the TMD of the stack.

公开(公告)号：US11508903B2

公开(公告)日：2022-11-22

申请号：US16022094

申请日：2018-06-28

Applicant: Intel Corporation

Inventor： Angeline Smith ,  Ian Young ,  Kaan Oguz ,  Sasikanth Manipatruni ,  Christopher Wiegand ,  Kevin O'Brien ,  Tofizur Rahman ,  Noriyuki Sato ,  Benjamin Buford ,  Tanay Gosavi

IPC: H01L43/02 ,  H01L27/22 ,  H01L43/10

Abstract: An insertion layer for perpendicular spin orbit torque (SOT) memory devices between the SOT electrode and the free magnetic layer, memory devices and computing platforms employing such insertion layers, and methods for forming them are discussed. The insertion layer is predominantly tungsten and improves thermal stability and perpendicular magnetic anisotropy in the free magnetic layer.

公开(公告)号：US11245068B2

公开(公告)日：2022-02-08

申请号：US16009035

申请日：2018-06-14

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Dmitri Nikonov ,  Benjamin Buford ,  Kaan Oguz ,  John J. Plombon ,  Ian A. Young

IPC: H01L43/10 ,  H01L43/02 ,  H01L27/22

Abstract: An apparatus is provided which comprises: a stack comprising a magnetoelectric (ME such as BiFeO3, (LaBi)FeO3, LuFeO3, PMN-PT, PZT, AlN, SmBiFeO3, Cr2O3, etc.) material and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, graphene, etc.); a magnet adjacent to a first portion of the TMD of the stack; a first interconnect adjacent to the magnet; a second interconnect adjacent to the ME material of the stack; and a third interconnect adjacent to a second portion of the TMD of the stack.

公开(公告)号：US20190326353A1

公开(公告)日：2019-10-24

申请号：US15960218

申请日：2018-04-23

Applicant: Intel Corporation

Inventor： Kevin O'Brien ,  Benjamin Buford ,  Kaan Oguz ,  Noriyuki Sato ,  Charles Kuo ,  Mark Doczy

IPC: H01L27/22 ,  H01L43/02 ,  H01L43/10 ,  H01L43/12 ,  G11C11/16

Abstract: A spin orbit torque (SOT) memory device includes an SOT electrode on an upper end of an MTJ device. The MTJ device includes a free magnet, a fixed magnet and a tunnel barrier between the free magnet and the fixed magnet and is coupled with a conductive interconnect at a lower end of the MTJ device. The SOT electrode has a footprint that is substantially the same as a footprint of the MTJ device. The SOT device includes a first contact and a second contact on an upper surface of the SOT electrode. The first contact and the second contact are laterally spaced apart by a distance that is no greater than a length of the MTJ device.

公开(公告)号：US11683939B2

公开(公告)日：2023-06-20

申请号：US16396451

申请日：2019-04-26

Applicant: Intel Corporation

Inventor： Benjamin Buford ,  Angeline Smith ,  Noriyuki Sato ,  Tanay Gosavi ,  Kaan Oguz ,  Christopher Wiegand ,  Kevin O'Brien ,  Tofizur Rahman ,  Gary Allen ,  Sasikanth Manipatruni ,  Emily Walker

IPC: H10B61/00 ,  H10N50/10 ,  H10N52/00 ,  H10N52/01 ,  H10N52/80

CPC classification number: H10B61/22 ,  H10N50/10 ,  H10N52/00 ,  H10N52/01 ,  H10N52/80

Abstract: A memory apparatus includes a first electrode having a spin orbit material. The memory apparatus further includes a first memory device on a portion of the first electrode and a first dielectric adjacent to a sidewall of the first memory device. The memory apparatus further includes a second memory device on a portion of the first electrode and a second dielectric adjacent to a sidewall of the second memory device. A second electrode is on and in contact with a portion of the first electrode, where the second electrode is between the first memory device and the second memory device. The second electrode has a lower electrical resistance than an electrical resistance of the first electrode. The memory apparatus further includes a first interconnect structure and a second interconnect, each coupled with the first electrode.

公开(公告)号：US11374164B2

公开(公告)日：2022-06-28

申请号：US16024714

申请日：2018-06-29

Applicant: Intel Corporation

Inventor： Tanay Gosavi ,  Sasikanth Manipatruni ,  Chia-Ching Lin ,  Kaan Oguz ,  Christopher Wiegand ,  Angeline Smith ,  Noriyuki Sato ,  Kevin O'Brien ,  Benjamin Buford ,  Ian Young ,  Md Tofizur Rahman

IPC: H01L43/02 ,  H01L27/22 ,  H01L43/12

Abstract: Embodiments herein relate to a system, apparatus, and/or process for producing a spin orbit torque (SOT) electrode that includes a first layer with a first side to couple with a free layer of a magnetic tunnel junction (MTJ) and a second layer coupled with a second side of the first layer opposite the first side, where a value of an electrical resistance in the first SOT layer is lower than a value of an electrical resistance in the second SOT layer and where a current applied to the SOT electrode is to cause current to preferentially flow in the first SOT layer to cause a magnetic polarization of the free layer to change directions. During production of the SOT electrode, the second layer may act as an etch stop.

公开(公告)号：US11276730B2

公开(公告)日：2022-03-15

申请号：US16246360

申请日：2019-01-11

Applicant: Intel Corporation

Inventor： Kevin O'Brien ,  Christopher Wiegand ,  Tofizur Rahman ,  Noriyuki Sato ,  Gary Allen ,  James Pellegren ,  Angeline Smith ,  Tanay Gosavi ,  Sasikanth Manipatruni ,  Kaan Oguz ,  Benjamin Buford ,  Ian Young

IPC: H01L27/22 ,  H01L43/04 ,  H01L43/14 ,  H01L43/08 ,  H01L43/10

Abstract: A perpendicular spin orbit memory device includes a first electrode having a magnetic material and platinum and a material layer stack on a portion of the first electrode. The material layer stack includes a free magnet, a fixed magnet above the first electrode, a tunnel barrier between the free magnet and the fixed magnet and a second electrode coupled with the fixed magnet.

公开(公告)号：US20200343301A1

公开(公告)日：2020-10-29

申请号：US16396451

申请日：2019-04-26

Applicant: Intel Corporation

Inventor： Benjamin Buford ,  Angeline Smith ,  Noriyuki Sato ,  Tanay Gosavi ,  Kaan Oguz ,  Christopher Wiegand ,  Kevin O'Brien ,  Tofizur Rahman ,  Gary Allen ,  Sasikanth Manipatruni ,  Emily Walker

IPC: H01L27/22 ,  H01L43/14 ,  H01L43/08 ,  H01L43/06 ,  H01L43/04

Abstract: A memory apparatus includes a first electrode having a spin orbit material. The memory apparatus further includes a first memory device on a portion of the first electrode and a first dielectric adjacent to a sidewall of the first memory device. The memory apparatus further includes a second memory device on a portion of the first electrode and a second dielectric adjacent to a sidewall of the second memory device. A second electrode is on and in contact with a portion of the first electrode, where the second electrode is between the first memory device and the second memory device. The second electrode has a lower electrical resistance than an electrical resistance of the first electrode. The memory apparatus further includes a first interconnect structure and a second interconnect, each coupled with the first electrode.

公开(公告)号：US20190385655A1

公开(公告)日：2019-12-19

申请号：US16009107

申请日：2018-06-14

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Dmitri Nikonov ,  Benjamin Buford ,  Kaan Oguz ,  John J. Plombon ,  Ian A. Young

IPC: G11C11/16 ,  H01L43/10 ,  H01L43/02

Abstract: An apparatus is provided which comprises: a stack comprising a magnetic insulating material (MI such as EuS, EuO, YIG, TmIG, or GaMnAs) and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, or graphene), wherein the magnetic insulating material has a first magnetization; a magnet with a second magnetization, wherein the magnet is adjacent to the TMD of the stack; and an interconnect comprising a spin orbit material, wherein the interconnect is adjacent to the magnet.

公开(公告)号：US12009018B2

公开(公告)日：2024-06-11

申请号：US17839345

申请日：2022-06-13

Applicant: Intel Corporation

Inventor： Chia-Ching Lin ,  Sasikanth Manipatruni ,  Tanay Gosavi ,  Dmitri Nikonov ,  Benjamin Buford ,  Kaan Oguz ,  John J. Plombon ,  Ian A. Young

IPC: G11C11/16 ,  H10N50/80 ,  H10N50/85

CPC classification number: G11C11/161 ,  H10N50/80 ,  H10N50/85

Abstract: An apparatus is provided which comprises: a stack comprising a magnetic insulating material (MI such as EuS, EuO, YIG, TmIG, or GaMnAs) and a transition metal dichalcogenide (TMD such as MoS2, MoSe2, WS2, WSe2, PtS2, PtSe2, WTe2, MoTe2, or graphene), wherein the magnetic insulating material has a first magnetization; a magnet with a second magnetization, wherein the magnet is adjacent to the TMD of the stack; and an interconnect comprising a spin orbit material, wherein the interconnect is adjacent to the magnet.