公开(公告)号：US20200373351A1

公开(公告)日：2020-11-26

申请号：US16635193

申请日：2017-09-18

Applicant: Intel Corporation

Inventor： Jeanette M. Roberts ,  Wesley T. Harrison ,  Adel A. Elsherbini ,  Stefano Pellerano ,  Zachary R. Yoscovits ,  Lester Lampert ,  Ravi Pillarisetty ,  Roman Caudillo ,  Hubert C. George ,  Nicole K. Thomas ,  David J. Michalak ,  Kanwaljit Singh ,  James S. Clarke

IPC: H01L27/18 ,  H01L39/02

Abstract: Embodiments of the present disclosure propose qubit substrates, as well as methods of fabricating thereof and related device assemblies. In one aspect of the present disclosure, a qubit substrate includes a base substrate of a doped semiconductor material, and a layer of a substantially intrinsic semiconductor material over the base substrate. Engineering a qubit substrate in this manner allows improving coherence times of qubits provided thereon, while, at the same time, being sufficiently mechanically robust so that it can be efficiently used in large-scale manufacturing.