公开(公告)号：US09052194B2

公开(公告)日：2015-06-09

申请号：US13966026

申请日：2013-08-13

Applicant: InvenSense, Inc.

Inventor： Joseph Seeger ,  Bruno Borovic

IPC: G01C19/00 ,  G01C19/56 ,  G01C19/5719

CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574

Abstract: An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.

Abstract translation: 包括驱动器扩展模式的角速度传感器。 一方面，角速度传感器包括基部和基本上设置在平行于基部的平面中的至少三个质量，质量块具有质心。 至少一个致动器以延伸模式驱动质量，使得在延伸模式中，质量在平面中同时移动或同时移向质心。 至少一个换能器感测由质量的运动和围绕传感器的至少一个输入轴的角速度产生的至少一个科里奥利力。 另外的实施例可以包括限制质量以伸展模式移动的连杆。

公开(公告)号：US09683844B2

公开(公告)日：2017-06-20

申请号：US14698451

申请日：2015-04-28

Applicant: InvenSense, Inc.

Inventor： Joseph Seeger ,  Bruno Borovic

IPC: G01C19/00 ,  G01C19/5712 ,  G01C19/5719 ,  G01C19/56

CPC classification number: G01C19/5712 ,  G01C19/56 ,  G01C19/5719 ,  G01C19/574

Abstract: An angular velocity sensor including a drive extension mode. In one aspect, an angular rate sensor includes a base and at least three masses disposed substantially in a plane parallel to the base, the masses having a center of mass. At least one actuator drives the masses in an extension mode, such that in the extension mode the masses move in the plane simultaneously away or simultaneously towards the center of mass. At least one transducer senses at least one Coriolis force resulting from motion of the masses and angular velocity about at least one input axis of the sensor. Additional embodiments can include a linkage that constrains the masses to move in the extension mode.