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公开(公告)号：US20170326591A1
公开(公告)日：2017-11-16
申请号：US15419835
申请日：2017-01-30
Applicant: InvenSense, Inc.
Inventor： Nikhil APTE , Renata Melamud BERGER , Michael DANEMAN
CPC classification number: B06B1/064 , B06B1/0292 , B06B1/06 , B06B2201/51 , B06B2201/55
Abstract: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane configured to allow movement at ultrasonic frequencies. The membrane comprises a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. For operation in a Capacitive Micromachined Ultrasonic Transducer (CMUT) mode, a third electrode is disposed on the substrate and separated by an air gap in the cavity from the second electrode. Also provided are an integrated MEMS array, a method for operating an array of PMUT/CMUT dual-mode devices, and a PMUT/CMUT dual-mode device.
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公开(公告)号：US20190005300A1
公开(公告)日：2019-01-03
申请号：US15636479
申请日：2017-06-28
Applicant: InvenSense, Inc.
Inventor： Bruno W. GARLEPP , James Christian SALVIA , Michael DANEMAN , Nikhil APTE , Julius Ming-Lin TSAI
Abstract: A method for generating a composite image having an increased image pixel density by an array of ultrasonic transducers having a given spatial density is provided. The method comprises capturing a first set of pixels at an ultrasonic sensor using a first beamforming pattern, wherein the first beamforming pattern comprises a first pattern of ultrasonic transducers of the ultrasonic sensor. The method further comprises capturing a second set of pixels at the ultrasonic sensor using a second beamforming pattern, wherein the second beamforming pattern comprises a second pattern of ultrasonic transducers. The first beamforming pattern and the second beamforming pattern are different. Pixels of the second set of pixels correspond to positions between pixels of the first set of pixels. The method additionally comprises combining the first and second sets of pixels to form the composite image. An electronic device and a method of generating an image of a fingerprint are also provided.
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3.发明申请公开(公告)号：US20200109045A1
公开(公告)日：2020-04-09
申请号：US16698535
申请日：2019-11-27
Applicant: INVENSENSE, INC.
Inventor： Michael DANEMAN , Martin LIM , Kegang HUANG , Igor TCHERTKOV
Abstract: A Microelectromechanical systems (MEMS) structure comprises a MEMS wafer. A MEMS wafer includes a handle wafer with cavities bonded to a device wafer through a dielectric layer disposed between the handle and device wafers. The MEMS wafer also includes a moveable portion of the device wafer suspended over a cavity in the handle wafer. Four methods are described to create two or more enclosures having multiple gas pressure or compositions on a single substrate including, each enclosure containing a moveable portion. The methods include: A. Forming a secondary sealed enclosure, B. Creating multiple ambient enclosures during wafer bonding, C. Creating and breaching an internal gas reservoir, and D. Forming and subsequently sealing a controlled leak/breach into the enclosure.
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公开(公告)号：US20200030850A1
公开(公告)日：2020-01-30
申请号：US16592618
申请日：2019-10-03
Applicant: InvenSense, Inc.
Inventor： Nikhil APTE , Renata Melamud BERGER , Michael DANEMAN
Abstract: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane configured to allow movement at ultrasonic frequencies. The membrane comprises a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. For operation in a Capacitive Micromachined Ultrasonic Transducer (CMUT) mode, a third electrode is disposed on the substrate and separated by an air gap in the cavity from the second electrode. Also provided are an integrated MEMS array, a method for operating an array of PMUT/CMUT dual-mode devices, and a PMUT/CMUT dual-mode device.
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Patent Agency Ranking
公开(公告)号：US20170328866A1
公开(公告)日：2017-11-16
申请号：US15424720
申请日：2017-02-03
Applicant: InvenSense, Inc.
Inventor： Nikhil APTE , Renata Melamud BERGER , Michael DANEMAN , James Christian SALVIA
CPC classification number: G01N29/326 , B06B1/0207 , B06B1/0292 , B06B1/0622 , B06B2201/20 , B06B2201/40 , B06B2201/50 , G01N29/04 , G01N29/30 , G01N29/38 , G01N29/4463 , G01S7/5205 , G01S7/521
Abstract: An electronic device including an array of ultrasonic transducers, a temperature sensor for determining a temperature of the array of ultrasonic transducers, and a control module communicatively coupled to the array of ultrasonic devices and the temperature sensor. The control module is for receiving the temperature and for controlling operation of the array of ultrasonic transducers based at least in part on the temperature.
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公开(公告)号：US20170326590A1
公开(公告)日：2017-11-16
申请号：US15424703
申请日：2017-02-03
Applicant: InvenSense, Inc.
Inventor： Michael DANEMAN
IPC: B06B1/06 , H01L41/08 , H01L41/047 , H01L41/18
CPC classification number: B06B1/0603 , B06B1/0622 , B06B1/0648 , B06B1/0651 , H01L41/0475 , H01L41/0805 , H01L41/18
Abstract: A Piezoelectric Micromachined Ultrasonic Transducer (PMUT) device is provided. The PMUT includes a substrate and an edge support structure connected to the substrate. A membrane is connected to the edge support structure such that a cavity is defined between the membrane and the substrate, where the membrane is configured to allow movement at ultrasonic frequencies. The membrane includes a piezoelectric layer and first and second electrodes coupled to opposing sides of the piezoelectric layer. The PMUT is also configured to operate in a Surface Acoustic Wave (SAW) mode. Also provided are an integrated MEMS array, a method for operating an array of PMUT/SAW dual-mode devices, and a PMUT/SAW dual-mode device.
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公开(公告)号：US20200074135A1
公开(公告)日：2020-03-05
申请号：US16679067
申请日：2019-11-08
Applicant: InvenSense, Inc.
Inventor： Bruno W. GARLEPP , Michael H. PERROTT , Michael DANEMAN , James Christian SALVIA , Nikhil APTE
IPC: G06K9/00
Abstract: A method for generating an image is provided. The method comprises capturing a first set of image pixels by an ultrasonic sensor comprising an array of ultrasonic transducers using a first beamforming pattern, wherein the first beamforming pattern comprises a first pattern of transmit signals routed to a plurality of ultrasonic transducers of the ultrasonic sensor. The method further comprises capturing a second set of image pixels at the ultrasonic sensor using a second beamforming pattern, wherein the second beamforming pattern comprises a second pattern of transmit signals routed to the plurality of ultrasonic transducers. The second beamforming pattern is different than the first beamforming pattern. The second set of image pixels corresponds to an edge region of the ultrasonic sensor. The method additionally comprises combining the first set of image pixels and the second set of image pixels to form the image. An electronic device and a method of generating an image of a fingerprint with a fingerprint sensor are also provided.
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公开(公告)号：US20180349663A1
公开(公告)日：2018-12-06
申请号：US15611704
申请日：2017-06-01
Applicant: InvenSense, Inc.
Inventor： Bruno W. GARLEPP , Michael H. PERROTT , Michael DANEMAN , James Christian SALVIA , Nikhil APTE
IPC: G06K9/00
CPC classification number: G06K9/0002
Abstract: A method for generating an image is provided. The method comprises capturing a first set of image pixels by an ultrasonic sensor comprising an array of ultrasonic transducers using a first beamforming pattern, wherein the first beamforming pattern comprises a first pattern of transmit signals routed to a plurality of ultrasonic transducers of the ultrasonic sensor. The method further comprises capturing a second set of image pixels at the ultrasonic sensor using a second beamforming pattern, wherein the second beamforming pattern comprises a second pattern of transmit signals routed to the plurality of ultrasonic transducers. The second beamforming pattern is different than the first beamforming pattern. The second set of image pixels corresponds to an edge region of the ultrasonic sensor. The method additionally comprises combining the first set of image pixels and the second set of image pixels to form the image. An electronic device and a method of generating an image of a fingerprint with a fingerprint sensor are also provided.
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9.发明申请公开(公告)号：US20170297907A1
公开(公告)日：2017-10-19
申请号：US15358956
申请日：2016-11-22
Applicant: INVENSENSE, INC.
Inventor： Michael DANEMAN , Martin LIM , Kegang HUANG , Igor TCHERTKOV
CPC classification number: B81B7/02 , B81C1/0023 , B81C1/00293 , B81C2203/0145 , B81C2203/019
Abstract: A Microelectromechanical systems (MEMS) structure comprises a MEMS wafer. A MEMS wafer includes a handle wafer with cavities bonded to a device wafer through a dielectric layer disposed between the handle and device wafers. The MEMS wafer also includes a moveable portion of the device wafer suspended over a cavity in the handle wafer. Four methods are described to create two or more enclosures having multiple gas pressure or compositions on a single substrate including, each enclosure containing a moveable portion. The methods include: A. Forming a secondary sealed enclosure, B. Creating multiple ambient enclosures during wafer bonding, C. Creating and breaching an internal gas reservoir, and D. Forming and subsequently sealing a controlled leak/breach into the enclosure.
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