公开(公告)号：US20240302405A1

公开(公告)日：2024-09-12

申请号：US18119492

申请日：2023-03-09

Applicant: InvenSense, Inc.

Inventor： Roberto Martini ,  Luca Coronato ,  Xian Huang

IPC: G01P15/18 ,  B81B7/02 ,  G01P15/125

CPC classification number: G01P15/18 ,  B81B7/02 ,  G01P15/125 ,  B81B2201/0235 ,  G01P2015/0848

Abstract: A dual axis accelerometer with a single proof mass measures in-plane acceleration (e.g., either along an x-axis or a y-axis), out-of-plane acceleration (e.g., normal to an x-y plane), and tilt of a fixed portion of a MEMS layer (e.g., normal to the x-y plane). In response to a tilt measurement, the dual-axis accelerometer compensates any offset (e.g., variability) of the out-of-plane accelerometer in order to maintain offset stability. In some embodiments, multiple dual axis accelerometers, perpendicularly configured, may be implemented via processing circuitry to offer three axis sensitivity capability.