公开(公告)号：US06453730B2

公开(公告)日：2002-09-24

申请号：US09805935

申请日：2001-03-15

Applicant: Isamu Takemura

Inventor： Isamu Takemura

IPC: G01B528

CPC classification number: G01B5/28 ,  G01B5/016

Abstract: A Stylus 1 is moved along the surface of a workpiece 20 and the surface texture of the workpiece 20 is measured based on the displacement of the stylus 1 in the Z direction. A spherical reference gage of known radius is measured with the stylus 1 in advance and radius values r of the tip sphere of the stylus 1 are calculated according to angle by subtracting the radius R of the reference gage from the measured values. The actual contour of workpiece 20 is calculated by using the radius values r as the correction data according to angle and subtracting the correction values according to angle and subtracting the correction values according to angle from the measured data obtained by movement along the surface of workpiece 20.

Abstract translation: 触针1沿着工件20的表面移动，并且基于触针1在Z方向上的位移来测量工件20的表面纹理。 使用触笔1预先测量已知半径的球面参考量规，并根据角度通过从测量值中减去参考计量器的半径R来计算触针1的尖端球体的半径值r。 通过使用根据角度的半径值r作为校正数据并根据角度减去校正值并根据从沿着工件20的表面移动获得的测量数据中的角度减去校正值来计算工件20的实际轮廓 。

公开(公告)号：US07162383B2

公开(公告)日：2007-01-09

申请号：US10833007

申请日：2004-04-28

Applicant: Isamu Takemura

Inventor： Isamu Takemura

IPC: G01J1/10

CPC classification number: G01B5/28 ,  G01B5/20

Abstract: In a calibration method for a surface texture measuring instrument which measures a surface of a workpiece and includes an arm that is supported to be swingable around a base point thereof and is provided with a contact point at an end for scanning the workpiece surface, the calibration method includes a measurement step for measuring a calibration gauge of which cross section contains a part of a substantially perfect circle, an assignment step for assigning the detection results, which are obtained in the measurement step, in an evaluation formula based on a circle equation in which the center coordinates of the calibration gauge are (xc, zc) and the radius is “r”, and a calibration step for calibrating each parameter based on the evaluation formula obtained in the assignment step.

Abstract translation: 在用于测量工件表面的表面纹理测量仪的校准方法中，包括支撑在其基点附近摆动的臂，并且在用于扫描工件表面的端部设置有接触点，校准 方法包括：测量步骤，用于测量横截面包含基本上完整圆的一部分的校准量规;分配步骤，用于将在测量步骤中获得的检测结果分配在基于圆形方程式的评估公式中 其中校准量规的中心坐标是（x，c，z，c），半径是“r”，以及校准步骤，用于基于评估来校准每个参数 在分配步骤中获得的公式。