公开(公告)号：US20230184671A1

公开(公告)日：2023-06-15

申请号：US17803029

申请日：2022-01-18

Applicant: J.A. WOOLLAM CO., INC.

Inventor： STEFAN SCHOECHE ,  CRAIG M. HERZINGER ,  STEVEN E. GREEN ,  MARTIN M. LIPHARDT ,  JAMES D. WELCH

IPC: G01N21/21

CPC classification number: G01N21/211 ,  G01N2201/06113 ,  G01N2201/12 ,  G01N2021/213 ,  G01N2201/021

Abstract: An ellipsometer, polarimeter and the like system operating in the infrared spectral range (0.75 μm to 1000 μm), utilizing a tunable quantum cascade laser (QCL) source in combination with dithering capability to reduce speckle and standing wave effects, dual-rotating optical elements, a single-point detector, as well as optional means of reducing the size of the probe beam at the measurement surface and optional chopper for lock-in detection.