公开(公告)号：US12131936B2

公开(公告)日：2024-10-29

申请号：US17394359

申请日：2021-08-04

Applicant: KABUSHIKI KAISHA YASKAWA DENKI

Inventor： Keisuke Yoshino ,  Tatsuyuki Urata

IPC: H01L21/68 ,  H01J37/32 ,  H01L21/67 ,  H01L21/687

CPC classification number: H01L21/681 ,  H01J37/32642 ,  H01J37/32733 ,  H01L21/67259 ,  H01L21/68707 ,  H01L21/6875 ,  H01J2237/334 ,  H01L21/68

Abstract: An alignment apparatus includes a rotational support configured to rotate around a central axis, a rotation actuator, an edge sensor, and control circuitry. The rotational support includes substrate supports configured to concurrently support a substrate, and ring supports configured to concurrently support a focus ring. The rotation actuator is configured to rotate the rotational support around the central axis. The edge sensor is configured to generate an edge signal that changes in accordance with each of an edge position of the substrate and an edge position of the focus ring. The control circuitry is configured to control the rotation actuator to adjust a posture of the substrate to a first target posture based on the edge signal, and to control the rotation actuator to adjust a posture of the focus ring to a second target posture based on the edge signal.