公开(公告)号：US10575075B2

公开(公告)日：2020-02-25

申请号：US16400776

申请日：2019-05-01

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Armando Arpys Arevalo Carreno ,  David Conchouso Gonzalez ,  David Castro Signoret ,  Ian G. Foulds

IPC: H04R1/00 ,  H04R31/00 ,  H04R1/02 ,  H04R17/00

Abstract: Various examples are provided for digital sound reconstruction using piezoelectric array elements. In one example, a digital loudspeaker includes a fixed frame and an array of transducers disposed on the fixed frame. Individual transducers of the array of transducers can include a flexible membrane disposed on a piezoelectric actuation element positioned over a corresponding opening that extends through the fixed frame. In another example, a method includes forming a flexible membrane structure on a substrate and backetching the substrate opposite the flexible membrane structure. The flexible membrane structure can be formed by disposing a first electrode layer on a substrate, disposing a piezoelectric layer on the first electrode layer and disposing a second electrode layer on the piezoelectric layer. A flexible membrane layer (e.g., polyimide) can be disposed on the second electrode layer.

公开(公告)号：US10327052B2

公开(公告)日：2019-06-18

申请号：US15563829

申请日：2016-04-07

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Armando Arpys Arevalo Carreno ,  David Conchouso Gonzalez ,  David Castro Signoret ,  Ian G. Foulds

IPC: H04R1/00 ,  H04R1/02 ,  H04R17/00 ,  H04R31/00

Abstract: Various examples are provided for digital sound reconstruction using piezoelectric array elements. In one example, a digital loudspeaker includes a fixed frame and an array of transducers disposed on the fixed frame. Individual transducers of the array of transducers can include a flexible membrane disposed on a piezoelectric actuation element positioned over a corresponding opening that extends through the fixed frame. In another example, a method includes forming a flexible membrane structure on a substrate and backetching the substrate opposite the flexible membrane structure. The flexible membrane structure can be formed by disposing a first electrode layer on a substrate, disposing a piezoelectric layer on the first electrode layer and disposing a second electrode layer on the piezoelectric layer. A flexible membrane layer (e.g., polyimide) can be disposed on the second electrode layer.