公开(公告)号：US20180023952A1

公开(公告)日：2018-01-25

申请号：US15720160

申请日：2017-09-29

Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY

Inventor： Ahmed KAMAL SAID ABDEL AZIZ ,  Abdel Hameed SHARAF ,  Mohamed Yousef SERRY ,  Sherif Salah SEDKY

IPC: G01C19/5719 ,  B81B3/00 ,  G01P15/125 ,  G01P15/08 ,  G01P15/18

CPC classification number: G01C19/5719 ,  B81B3/0062 ,  B81B2201/0242 ,  G01P15/08 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/082

Abstract: MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) using an out-of-plane (or vertical) suspension scheme, wherein the suspensions are normal to the proof mass, are disclosed. Such out-of-plane suspension scheme helps such MEMS mass-spring-damper systems achieve inertial grade performance. Methods of fabricating out-of-plane suspensions in MEMS mass-spring-damper systems (including MEMS gyroscopes and accelerometers) are also disclosed.