公开(公告)号：US20240183790A1

公开(公告)日：2024-06-06

申请号：US18120765

申请日：2023-03-13

Applicant: KLA Corporation

Inventor： Lim Chow Tian ,  Rajeev Patil ,  Jinson Jayan

IPC: G01N21/88 ,  G01N21/95

CPC classification number: G01N21/8806 ,  G01N21/9501 ,  G01N2201/025

Abstract: A lifter assembly for an optical system includes a chuck having a chuck base and a detachable top plate, wherein the detachable top plate is one of a plurality of interchangeable detachable top plates configured to support a substrate. The lifter assembly also includes a moveable plate supporting the chuck on an upper surface of the moveable plate, the moveable plate vertically adjustable between a lower, retracted position and an upper, extended position. The lifter assembly further includes a bellows structure operatively coupled to the moveable plate. The lifter assembly yet further includes a pneumatic system fluidly coupled to the bellows structure to selectively expand and contract, wherein expansion of the bellows structure vertically adjusts the moveable plate to the upper, extended position and contraction of the bellows structure vertically adjusts the moveable plate to the lower, retracted position.