公开(公告)号：US11703460B2

公开(公告)日：2023-07-18

申请号：US16913396

申请日：2020-06-26

Applicant: KLA Corporation

Inventor： Zhiwei Xu ,  Kurt Haller ,  J. K. Leong ,  Christian Wolters

IPC: G01N21/95 ,  G01N21/45

CPC classification number: G01N21/9505 ,  G01N21/45 ,  G01N2201/064 ,  G01N2201/06113

Abstract: Methods and systems for detecting and classifying defects based on the phase of dark field scattering from a sample are described herein. In some embodiments, throughput is increased by detecting and classifying defects with the same optical system. In one aspect, a defect is classified based on the measured relative phase of scattered light collected from at least two spatially distinct locations in the collection pupil. The phase difference, if any, between the light transmitted through any two spatially distinct locations at the pupil plane is determined from the positions of the interference fringes in the imaging plane. The measured phase difference is indicative of the material composition of the measured sample. In another aspect, an inspection system includes a programmable pupil aperture device configured to sample the pupil at different, programmable locations in the collection pupil.

公开(公告)号：US20210010949A1

公开(公告)日：2021-01-14

申请号：US16913396

申请日：2020-06-26

Applicant: KLA Corporation

Inventor： Zhiwei Xu ,  Kurt Haller ,  J.K. Leong ,  Christian Wolters

IPC: G01N21/95 ,  G01N21/45

Abstract: Methods and systems for detecting and classifying defects based on the phase of dark field scattering from a sample are described herein. In some embodiments, throughput is increased by detecting and classifying defects with the same optical system. In one aspect, a defect is classified based on the measured relative phase of scattered light collected from at least two spatially distinct locations in the collection pupil. The phase difference, if any, between the light transmitted through any two spatially distinct locations at the pupil plane is determined from the positions of the interference fringes in the imaging plane. The measured phase difference is indicative of the material composition of the measured sample. In another aspect, an inspection system includes a programmable pupil aperture device configured to sample the pupil at different, programmable locations in the collection pupil.