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1.发明申请Inspection System Including Parallel Imaging Paths with Multiple and Selectable Spectral Bands 审中-公开包括具有多个和可选光谱带的并行成像路径的检查系统公开(公告)号：US20140285657A1
公开(公告)日：2014-09-25
申请号：US14215580
申请日：2014-03-17
Applicant: KLA-Tencor Corporation
Inventor： Shiow-Hwei Hwang , Amir Bar , Grace Hsiu-Ling Chen , Daniel L. Cavan
IPC: G01N21/88
CPC classification number: G01N21/9501 , G01N21/8806 , G01N2021/8845
Abstract: The present disclosure is directed to a system for inspecting a sample with multiple wavelengths of illumination simultaneously via parallel imaging paths. The system may include at least a first detector or set of detectors configured to detect illumination reflected, scattered, or radiated along a first imaging path from a selected portion of the sample in response to the first wavelength of illumination and a second detector or set of detectors configured to concurrently detect illumination reflected, scattered, or radiated along a second imaging path from the selected portion of the sample (i.e. the same location on the sample) in response to the second wavelength of illumination, where the second imaging path may at least partially share illumination and/or detection optics with an autofocus channel.
Abstract translation: 本公开涉及一种用于经由并行成像路径同时检查具有多个照明波长的照明的样本的系统。 该系统可以包括至少第一检测器或一组检测器，其被配置为响应于第一照明波长，从样品的选定部分沿着第一成像路径检测沿第一成像路径反射，散射或辐射的照射;以及第二检测器或一组 检测器被配置为响应于第二波长的照明，同时检测沿着第二成像路径从样本的所选部分（即样本上的相同位置）反射，散射或辐射的照射，其中第二成像路径可以至少 通过自动对焦通道部分共享照明和/或检测光学元件。
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2.发明授权公开(公告)号：US10429319B2
公开(公告)日：2019-10-01
申请号：US14215580
申请日：2014-03-17
Applicant: KLA-Tencor Corporation
Inventor： Shiow-Hwei Hwang , Amir Bar , Grace Hsiu-Ling Chen , Daniel L. Cavan
Abstract: The present disclosure is directed to a system for inspecting a sample with multiple wavelengths of illumination simultaneously via parallel imaging paths. The system may include at least a first detector or set of detectors configured to detect illumination reflected, scattered, or radiated along a first imaging path from a selected portion of the sample in response to the first wavelength of illumination and a second detector or set of detectors configured to concurrently detect illumination reflected, scattered, or radiated along a second imaging path from the selected portion of the sample (i.e. the same location on the sample) in response to the second wavelength of illumination, where the second imaging path may at least partially share illumination and/or detection optics with an autofocus channel.
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