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公开(公告)号：US20170140516A1
公开(公告)日：2017-05-18
申请号：US15350632
申请日：2016-11-14
Applicant: KLA-Tencor Corporation
Inventor： Christopher Maher , Bjorn Brauer , Vijayakumar Ramachandran , Laurent Karsenti , Eliezer Rosengaus , John R. Jordan, III , Roni Miller
CPC classification number: G06T7/001 , G06K9/6202 , G06K9/6212 , G06K9/74 , G06T7/11 , G06T2207/20182 , G06T2207/30148
Abstract: A defect detection method includes acquiring a reference image; selecting a target region of the reference image; identifying, based on a matching metric, one or more comparative regions of the reference image corresponding to the target region; acquiring a test image; masking the test image with the target region of the reference image and the one or more comparative regions of the reference image; defining a defect threshold for the target region in the test image based on the one or more comparative regions in the test image; and determining whether the target region of the test image contains a defect based on the defect threshold.
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公开(公告)号：US09222771B2
公开(公告)日：2015-12-29
申请号：US13652232
申请日：2012-10-15
Applicant: KLA-Tencor Corporation
Inventor： Eliezer Rosengaus , Ady Levy , Kris Bhaskar
CPC classification number: G01C15/002
Abstract: Systems and methods for acquiring information for a construction site are provided. One system includes a base unit positioned within a construction site by a user. A computer subsystem of the base unit determines a position of the base unit with respect to the construction site. The system also includes a measurement unit moved within the construction site by a user. The measurement unit includes one or more elements configured to interact with light in a known manner. An optical subsystem of the base unit directs light to the element(s) and detects the light after interacting with the element(s). The computer subsystem is configured to determine a position and pose of the measurement unit with respect to the base unit based on the detected light. The measurement unit includes a measurement device used by the measurement unit or the base unit to determine information for the construction site.
Abstract translation: 提供了获取施工现场信息的系统和方法。 一个系统包括由用户定位在施工现场内的基座单元。 基座的计算机子系统确定基座相对于施工现场的位置。 该系统还包括由用户在施工现场内移动的测量单元。 测量单元包括被配置为以已知方式与光相互作用的一个或多个元件。 基本单元的光学子系统将光引导到元件，并在与元件相互作用之后检测光。 计算机子系统被配置为基于检测到的光来确定测量单元相对于基本单元的位置和姿态。 测量单元包括由测量单元或基座单元用于确定施工现场的信息的测量装置。
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公开(公告)号：US10535131B2
公开(公告)日：2020-01-14
申请号：US15350632
申请日：2016-11-14
Applicant: KLA-Tencor Corporation
Inventor： Christopher Maher , Bjorn Brauer , Vijayakumar Ramachandran , Laurent Karsenti , Eliezer Rosengaus , John R. Jordan, III , Roni Miller
Abstract: A defect detection method includes acquiring a reference image; selecting a target region of the reference image; identifying, based on a matching metric, one or more comparative regions of the reference image corresponding to the target region; acquiring a test image; masking the test image with the target region of the reference image and the one or more comparative regions of the reference image; defining a defect threshold for the target region in the test image based on the one or more comparative regions in the test image; and determining whether the target region of the test image contains a defect based on the defect threshold.
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公开(公告)号：US20130096873A1
公开(公告)日：2013-04-18
申请号：US13652232
申请日：2012-10-15
Applicant: KLA-Tencor Corporation
Inventor： Eliezer Rosengaus , Ady Levy , Kris Bhaskar
CPC classification number: G01C15/002
Abstract: Systems and methods for acquiring information for a construction site are provided. One system includes a base unit positioned within a construction site by a user. A computer subsystem of the base unit determines a position of the base unit with respect to the construction site. The system also includes a measurement unit moved within the construction site by a user. The measurement unit includes one or more elements configured to interact with light in a known manner. An optical subsystem of the base unit directs light to the element(s) and detects the light after interacting with the element(s). The computer subsystem is configured to determine a position and pose of the measurement unit with respect to the base unit based on the detected light. The measurement unit includes a measurement device used by the measurement unit or the base unit to determine information for the construction site.
Abstract translation: 提供了获取施工现场信息的系统和方法。 一个系统包括由用户定位在施工现场内的基座单元。 基座的计算机子系统确定基座相对于施工现场的位置。 该系统还包括由用户在施工现场内移动的测量单元。 测量单元包括被配置为以已知方式与光相互作用的一个或多个元件。 基本单元的光学子系统将光引导到元件，并在与元件相互作用之后检测光。 计算机子系统被配置为基于检测到的光来确定测量单元相对于基本单元的位置和姿态。 测量单元包括由测量单元或基座单元用于确定施工现场的信息的测量装置。
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