公开(公告)号：US09103800B2

公开(公告)日：2015-08-11

申请号：US13953644

申请日：2013-07-29

Applicant: KLA-Tencor Corporation

Inventor： Richard E. Bills ,  Neil Judell ,  Timothy R. Tiemeyer ,  James P. McNiven

IPC: G01N21/00 ,  G01N21/88 ,  G01N21/21 ,  G01N21/47 ,  G01N21/55 ,  G01N21/95 ,  G01N21/956 ,  G06T7/00

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A method for inspecting a surface of a workpiece for asymmetric defects, by scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light extending along a light channel axis in a front quartersphere and scattered light, the incident beam and the light channel axis defining an incident plane, collecting the scattered light at a plurality of collectors disposed above the surface at defined locations such that scatter from asymmetric defects is collectable by at least one collector, detecting collector output and generating signals in response, and processing the signals associated with each collector individually to obtain information about asymmetric defects.

Abstract translation: 一种用于通过扫描工件表面上的入射光束以撞击在其上以产生沿着前四分之一圆周和散射光中的光通道轴延伸的反射光来检查工件的表面的非对称缺陷的方法，入射光束和 光通道轴限定入射平面，在设置在表面上的多个收集器处收集散射光，所述收集器在限定的位置处，使得来自不对称缺陷的散射可由至少一个收集器收集，检测收集器输出并响应于产生信号，并且处理 分别与每个收集器相关联的信号以获得关于非对称缺陷的信息。

公开(公告)号：US20130335733A1

公开(公告)日：2013-12-19

申请号：US13953644

申请日：2013-07-29

Applicant: KLA-Tencor Corporation

Inventor： Richard E. Bills ,  Neil Judell ,  Timothy R. Tiemeyer ,  James P. McNiven

IPC: G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/21 ,  G01N21/47 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/55 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/95 ,  G01N21/956 ,  G01N2021/4707 ,  G01N2021/4711 ,  G01N2021/4792 ,  G01N2021/556 ,  G01N2021/8809 ,  G01N2021/8848 ,  G01N2021/8864 ,  G01N2021/8877 ,  G01N2021/8896 ,  G01N2201/0612 ,  G01N2201/105 ,  G06T7/0004 ,  G06T2207/30148 ,  Y10T29/49826

Abstract: A method for inspecting a surface of a workpiece for asymmetric defects, by scanning an incident beam on the surface of the workpiece to impinge thereon to create reflected light extending along a light channel axis in a front quartersphere and scattered light, the incident beam and the light channel axis defining an incident plane, collecting the scattered light at a plurality of collectors disposed above the surface at defined locations such that scatter from asymmetric defects is collectable by at least one collector, detecting collector output and generating signals in response, and processing the signals associated with each collector individually to obtain information about asymmetric defects.

Abstract translation: 一种用于通过扫描工件表面上的入射光束以撞击在其上以产生沿着前四分之一圆周和散射光中的光通道轴延伸的反射光来检查工件的表面的非对称缺陷的方法，入射光束和 光通道轴限定入射平面，在设置在表面上的多个收集器处收集散射光，所述收集器在限定的位置处，使得来自不对称缺陷的散射可由至少一个收集器收集，检测收集器输出并响应于产生信号，并且处理 分别与每个收集器相关联的信号以获得关于非对称缺陷的信息。