公开(公告)号：US20160216215A1

公开(公告)日：2016-07-28

申请号：US14913749

申请日：2014-08-25

Applicant: KOH YOUNG TECHNOLOGY INC.

Inventor： Deok-Hwa HONG ,  Jeong-Joo KUM ,  Seung-Ho SONG

IPC: G01N21/95 ,  G06T11/60 ,  G06T11/20 ,  G01B11/06

CPC classification number: G06T11/206 ,  G01N21/95684 ,  G01N2201/061 ,  G01N2201/062 ,  G01N2201/12 ,  G05B19/41875 ,  G05B2219/34417 ,  G05B2219/35512 ,  G05B2219/37216 ,  G05B2219/37449 ,  G05B2219/45035 ,  G06T11/60 ,  G06T2200/24 ,  Y02P90/22

Abstract: The present invention relates to a substrate inspecting apparatus which is capable of reducing an inspection time of a substrate having a plurality of inspection regions and improving convenience of a user. The substrate inspecting apparatus according to an embodiment of the present invention includes an inspection unit inspecting inspection regions of a substrate according to an inspection sequence to obtain image data of the inspection regions, a control unit comprising a plurality of data processing parts processing the image data of the inspection regions, which is transmitted by the inspection unit, and an optimization module optimizing the inspection sequence of the inspection regions and a data processing sequence of the data processing parts, and a user interface displaying an optimization-oriented information relating the inspection sequence and the data processing sequence optimized by the optimization module.

Abstract translation: 本发明涉及能够减少具有多个检查区域的基板的检查时间并提高使用者便利性的基板检查装置。 根据本发明实施例的基板检查装置包括检查单元，根据检查顺序检查基板的检查区域以获得检查区域的图像数据;控制单元，包括处理图像数据的多个数据处理部件 由检查单元发送的检查区域和优化检查区域的检查顺序的优化模块以及数据处理部件的数据处理顺序，以及显示与检查顺序有关的优化导向信息的用户界面 和优化模块优化的数据处理顺序。