公开(公告)号：US20150162852A1

公开(公告)日：2015-06-11

申请号：US14624945

申请日：2015-02-18

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： PETER DIRKSEN ,  RUEDIGER MAUCZOK ,  KORAY KARAKAYA ,  JOHAN HENDRIK KLOOTWIJK ,  BOUT MARCELIS ,  MARCEL MULDER

IPC: H02N1/00 ,  H02N1/08

CPC classification number: H02N1/006 ,  B06B1/0292 ,  B81B3/00 ,  B81B2203/0127 ,  B81C1/00158 ,  B81C1/00373 ,  H02N1/08

Abstract: The present invention relates to a method of manufacturing a capacitive micro-machined transducer (100), in particular a CMUT, the method comprising depositing a first electrode layer (10) on a substrate (1), depositing a first dielectric film (20) on the first electrode layer (10), depositing a sacrificial layer (30) on the first dielectric film (20), the sacrificial layer (30) being removable for forming a cavity (35) of the transducer, depositing a second dielectric film (40) on the sacrificial layer (30), and depositing a second electrode layer (50) on the second dielectric film (40), wherein the first dielectric film (20) and/or the second dielectric film (40) comprises a first layer comprising an oxide, a second layer comprising a high-k material, and a third layer comprising an oxide, and wherein the depositing steps are performed by Atomic Layer Deposition. The present invention further relates to a capacitive micro-machined transducer (100), in particular a CMUT, manufactured by such method.

Abstract translation: 本发明涉及一种制造电容微加工的换能器（100），特别是CMUT的方法，该方法包括在衬底（1）上沉积第一电极层（10），沉积第一电介质膜（20） 在所述第一电极层（10）上，在所述第一介电膜（20）上沉积牺牲层（30），所述牺牲层（30）可去除以形成所述换能器的空腔（35），沉积第二电介质膜 40），并且在所述第二电介质膜（40）上沉积第二电极层（50），其中所述第一电介质膜（20）和/或所述第二电介质膜（40）包括第一层 包括氧化物，包含高k材料的第二层和包含氧化物的第三层，并且其中所述沉积步骤通过原子层沉积进行。 本发明还涉及通过这种方法制造的电容式微加工的换能器（100），特别是CMUT。

公开(公告)号：US20160203809A1

公开(公告)日：2016-07-14

申请号：US14914019

申请日：2014-08-18

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： GEORGE ANTHONY BROCK-FISHER ,  RICHARD EDWARD DAVIDSEN ,  CARL DEAN HERICKHOFF ,  BOUT MARCELIS ,  WOJTEK SUDOL ,  JUNHO SONG

IPC: G10K11/00 ,  A61B8/00

CPC classification number: B06B1/0292 ,  A61B8/4494 ,  G10K11/002

Abstract: The invention relates to a capacitive micro-machined ultrasound transducer (CMUT) cell (6) comprising a cell floor (31) having a first electrode (7); a cell membrane (5) having a second electrode (7′) which opposes the first electrode and vibrates during transmission or reception of acoustic energy; a transmitter/receiver coupled to the first and second electrodes which causes the cell membrane to vibrate at an acoustic frequency and/or receives signals at an acoustic frequency; and an acoustic lens (13), overlaying the cell membrane, and having an inner surface opposing the cell membrane and an outer, patient-facing surface. According to the present invention the acoustic lens comprises at least one layer of a material selected from the group of: polybudatiene, polyether block amide (PEBAX), polydimethylsiloxane (PDMS) and buthylrubber.

Abstract translation: 本发明涉及一种电容微加工超声换能器（CMUT）电池（6），其包括具有第一电极（7）的电池底板（31）; 具有与所述第一电极相对的第二电极（7'）的细胞膜（5）在声能的传输或接收期间振动; 耦合到第一和第二电极的发射器/接收器，其使得细胞膜以声学频率振动和/或以声频接收信号; 以及覆盖所述细胞膜的声透镜（13），并且具有与所述细胞膜相对的内表面和面向患者的外部表面。 根据本发明，声透镜包括至少一层选自以下的材料：聚苯二烯，聚醚嵌段酰胺（PEBAX），聚二甲基硅氧烷（PDMS）和丁基橡胶。