公开(公告)号：US11087952B2

公开(公告)日：2021-08-10

申请号：US16067564

申请日：2016-12-29

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Dal Hyun Kim ,  Byong Chon Park ,  Chae Ho Shin

IPC: H01J37/20 ,  H01L41/00 ,  G01Q10/04 ,  H02N2/02 ,  H02N2/04 ,  G02B21/26

Abstract: Provided is a linear structure for displacement transmission that can be bent in a second direction or a third direction when force in the second direction or the third direction is applied and can transmit a displacement in a first direction from an end of one side to an end of the other side when force in the first direction is applied. The linear structure includes a displacement transmission plate and a plurality of displacement transmission rods disposed radially on the displacement transmission plate to transmit the displacement in the first direction from the end of one side to the end of the other side.

公开(公告)号：US10191081B2

公开(公告)日：2019-01-29

申请号：US15238326

申请日：2016-08-16

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Byong Chon Park ,  DalHyun Kim ,  ChaeHo Shin

IPC: G01Q60/32 ,  G01Q10/06

Abstract: Provided is a measuring method for an atomic force microscope that scans a surface of a sample with a probe to measure a surface property of the sample, the measuring method including detecting a motion of the probe while vibrating the probe on the surface of the sample, acquiring surface information on the sample by using a variation in the motion of the probe, and controlling the probe by using the surface information on the sample. The surface information on the sample may include a position and a slope of the surface. The vibrating of the probe on the surface of the sample may include performing a circular motion by the probe around axes perpendicular to a scan direction of the probe and to a height direction of the sample.

公开(公告)号：US09939461B2

公开(公告)日：2018-04-10

申请号：US15323078

申请日：2015-12-23

Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE

Inventor： Dal Hyun Kim ,  Byong Chon Park ,  Chae Ho Shin

IPC: G01Q60/32

CPC classification number: G01Q60/32 ,  G01Q20/02 ,  G01Q30/02 ,  G01Q30/18 ,  G01Q60/38

Abstract: An object of the application is to provide a head-integrated for an atomic force microscope capable of realizing minimization of a weight and a volume and improvement of structural stability by optimizing a head structure of the atomic force microscope. Another object of the application is to provide a head-integrated atomic force microscope capable of being utilized for imaging a large-area sample by enabling high-rate head scan due to dynamic characteristics improved by mounting the integrated-head described above. Still another object of the application is to provide a composite microscope including a head-integrated atomic force microscope, capable of performing high-rate position search and imaging and performing precise observation of a three-dimensional shape up to an atomic image level in a region of interest by combining the head-integrated atomic force microscope having the improved dynamic characteristics as described above and an electron microscope or an optical microscope with each other.