-
1.发明申请公开(公告)号：US20200040285A1
公开(公告)日：2020-02-06
申请号：US16485091
申请日：2017-03-09
Applicant: KURITA WATER INDUSTRIES LTD.
Inventor： Yuuichi OGAWA
Abstract: A conductive aqueous solution production device 1 has an ion exchange device 2 mounted on the way of the main pipe 11 supplying ultrapure water W as raw water, a supply pipe 12 which joins the main pipe 11 on the downstream side of the ion exchange device 2, and a conductivity-imparting substance supply device 3. For example, if the conductivity-imparting substance is ammonia, since the ions are cations, that is, ammonium ions (NH4+), it is preferable that an ion exchanger which fills the ion exchange device 2 be a cation exchange resin. If the conductivity-imparting substance is carbon dioxide, the ions are anions, that is, bicarbonate ions (HCO3−) or carbonate ions (CO32−), and therefore it is preferable that the ion exchange device 2 be filled with an anion exchange resin. Such a conductive aqueous solution production device is capable of producing a conductive aqueous solution with a stable concentration, and achieves excellent follow-up performance with respect to a change in concentration.
-
公开(公告)号：US20240150206A1
公开(公告)日：2024-05-09
申请号：US18279917
申请日：2022-03-09
Applicant: KURITA WATER INDUSTRIES LTD.
Inventor： Yuuichi OGAWA
Abstract: Functional aqueous solution supply apparatus (1) has a replenishment water production unit (3) that is supplied with ultrapure water (W) from a pipe conduit (2) and produces functional aqueous solution as washing water (W1), a storage tank (5) that is supplied/replenished with the produced washing water (W1) via a pipe (4), and a circulation pipe conduit (7) that supplies the washing water (W1) from the storage tank (5) to single-wafer type washers (6A, 6B, 6C, and 6D) and returns unused washing water (W1) to the storage tank (5). The circulation pipe conduit (7) is branched into supply pipes (7A, 7B, 7C, and 7D) and is further connected to return pipes (8A, 8B, 8C, and 8D) that communicate into the circulation pipe conduit (7) from the washers (6A, 6B, . . . ), respectively. The operation plan of the washers (6A, 6B, . . . ) is preliminarily transmitted to a control means (9), and this control means (9) can control the replenishment water production unit (3). Such a functional aqueous solution supply apparatus can supply the functional aqueous solution as the washing water to use points such as washing apparatuses for electronic components/electronic members, etc.
-
公开(公告)号：US20230142129A1
公开(公告)日：2023-05-11
申请号：US17800527
申请日：2020-09-15
Applicant: KURITA WATER INDUSTRIES LTD.
Inventor： Yuuichi OGAWA
CPC classification number: C02F1/686 , F04B23/00 , F04B53/06 , C02F2209/04
Abstract: A dilute solution production apparatus produces a dilute solution of a second liquid containing at least one of a conductivity-imparting substance and an oxidation-reduction potential regulating substance by adding the second liquid to a first liquid, and is provided with: a first pipe through which the first liquid flows; a pump for adding the second liquid into of the first pipe via a second pipe; a degassing pipe which extends from the pump; a water quality sensor which is composed of a conductivity meter, a resistivity meter or an oxidation-reduction potential meter; and a control device for opening a degassing valve when a water quality detection value in the water quality sensor varies by a predetermined value or more.
-
-
Search Results
3
records
(took 0.011 seconds)
