公开(公告)号：US20130263847A1

公开(公告)日：2013-10-10

申请号：US13856637

申请日：2013-04-04

Applicant: Klaus KADEL

Inventor： Klaus KADEL

IPC: A61M11/02

CPC classification number: A61M11/02 ,  B81C1/00206 ,  B81C2201/0112 ,  B81C2201/018

Abstract: In a method of producing trench-like depressions (24) in the surface of a wafer (27), particularly a silicon wafer, by plasma etching, in which the depressions (24) are produced by alternate passivation and etching, each depression (24) in its final geometry is provided with a protective layer (30) of the polytetrafluoroethylene type.

Abstract translation: 在通过等离子体蚀刻在晶片（27）表面（特别是硅晶片）的表面中制造沟槽状凹陷（24）的方法中，通过交替的钝化和蚀刻产生凹陷（24），每个凹陷（24 ）在其最终几何形状中设置有聚四氟乙烯类型的保护层（30）。

公开(公告)号：US20070215723A1

公开(公告)日：2007-09-20

申请号：US11682604

申请日：2007-03-06

Applicant: Achim MOSER ,  Klaus KADEL

Inventor： Achim MOSER ,  Klaus KADEL

IPC: B05B1/34

CPC classification number: B05B1/3436 ,  B05B15/40

Abstract: A simple, compact construction and easy manufacture of a swirl nozzle having a plurality of inlet channels and an outlet channel extending transversely thereto are made possible by the fact that the inlet channels open directly and/or tangentially into the outlet channel. Alternatively or additionally, upstream of the inlet channels is provided a filter structure having smaller flow cross-sections than the inlet channels. The swirl nozzle is used, in particular, for atomizing a liquid medicament formulation. The swirl nozzle is produced from two plate-shaped components, the outlet channel first being etched as a blind bore in one component and then opened up by grinding the component away. Alternatively or additionally, the outlet channel is formed in a different component from the inlet channels.

Abstract translation: 简单紧凑的结构和易于制造具有多个入口通道和横向延伸的出口通道的旋流喷嘴由于入口通道直接和/或切向进入出口通道的事实成为可能。 替代地或另外地，入口通道的上游设置有具有比入口通道更小的流动横截面的过滤器结构。 旋涡喷嘴特别用于雾化液体药物制剂。 涡流喷嘴由两个板状部件制成，出口通道首先被作为盲孔蚀刻在一个部件中，然后通过磨削部件而打开。 或者或另外，出口通道形成在与入口通道不同的部件中。