MEMS ULTRASONIC TRANSDUCER
    1.
    发明申请

    公开(公告)号:US20210377652A1

    公开(公告)日:2021-12-02

    申请号:US16322463

    申请日:2017-07-28

    Abstract: An ultrasonic device includes a substrate, a transmitter disposed over the substrate, the transmitter including an ultrasonic transmitting transducer configured to generate ultrasonic signals, and a receiver disposed over the substrate, the receiver including an ultrasonic receiving transducer configured to sense ultrasonic signals. The ultrasonic device further includes a first horn-shaped acoustic channel, wherein a material of at least one portion of the first horn-shaped acoustic channel is the same as a material of at least one portion of the transmitter or the receiver.

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