公开(公告)号：US20020185467A1

公开(公告)日：2002-12-12

申请号：US10202053

申请日：2002-07-23

Applicant: Lam Research Corporation

Inventor： John Boyd ,  K. Y. Ramanujam ,  Sridharan Srivatsan ,  Xuyen Pham

IPC: B44C001/22 ,  H01L021/302

CPC classification number: B24B37/26 ,  B24B21/04 ,  B24B47/00

Abstract: An interlocking polishing belt apparatus is disclosed. The interlocking polishing belt apparatus includes an interlocking belt, which includes a plurality of studs each having an upper stud end and a lower stud end. In addition, the interlocking polishing belt apparatus includes a polishing belt that is in contact with the interlocking belt. The polishing belt has a plurality of polishing belt stud holes, each configured to interlock with an upper stud end.

Abstract translation: 公开了一种互锁的抛光带装置。 互锁抛光带装置包括互锁带，其包括多个螺柱，每个螺柱具有上螺柱端部和下螺柱端部。 此外，互锁抛光带装置包括与互锁带接触的研磨带。 抛光带具有多个抛光带螺栓孔，每个抛光带螺栓孔被构造成与上螺柱端部互锁。

公开(公告)号：US20040154637A1

公开(公告)日：2004-08-12

申请号：US10360322

申请日：2003-02-06

Applicant: LAM RESEARCH CORPORATION

Inventor： John Boyd ,  Andras Kuthi ,  Michael G. R. Smith ,  Thomas W. Anderson ,  William Thie

IPC: B08B007/00 ,  H01L021/00

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67057 ,  Y10S134/902

Abstract: A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.

Abstract translation: 清洁衬底的系统和方法包括包括换能器和衬底的兆声波室。 换能器朝向基板。 可变距离d分离换能器和基板。 该系统还包括具有耦合到换能器的输出的动态可调的RF发生器。