公开(公告)号：US20250164526A1

公开(公告)日：2025-05-22

申请号：US18695091

申请日：2022-09-26

Applicant: LAM RESEARCH CORPORATION

Inventor： John PEASE ,  Thomas W. ANDERSON ,  Michael DRYMON

IPC: G01R1/067 ,  G01R31/28

Abstract: A probe assembly includes a stepped insulator and a printed circuit board. The insulator is configured to surround a current carrying conductor. The printed circuit board includes a main portion and an outward protruding portion. The outward protruding portion is implemented as a voltage probe and extends outward away from the main portion and into the insulator. The printed circuit board includes a conductive element, one or more dielectric layers, and a pickup element, where the conductive element extends through the one or more dielectric layers and is connected to the pickup element, and where the pickup element is embedded in the one or more dielectric layers and disposed proximate the current carrying conductor. The printed circuit board includes signal conditioning components connected to the conductive element of the voltage probe.