公开(公告)号：US11486693B2

公开(公告)日：2022-11-01

申请号：US16528509

申请日：2019-07-31

Applicant: Lasertec Corporation

Inventor： Ko Gondaira ,  Teruaki Yamazaki ,  Hideo Takizawa

IPC: G01B11/02 ,  G01B11/24 ,  G01B11/06 ,  G01N21/84 ,  H01L21/64 ,  G01B11/30

Abstract: A measurement apparatus and a measurement method capable of speedily and accurately measuring an edge shape are provided. A measurement apparatus according to an aspect of the present disclosure includes an objective lens positioned so that its focal plane cuts across an edge part of a substrate, a detector including a plurality of pixels and configured to detect a reflected light from the edge part of the substrate through a confocal optical system, an optical head in which the objective lens and the detector are disposed, a moving mechanism configured to change a relative position of the optical head with respect to the substrate so that an inclination of the focal plane with respect to the substrate is changed, and a processing unit configured to measure a shape of the edge part.

公开(公告)号：US11372222B2

公开(公告)日：2022-06-28

申请号：US16722823

申请日：2019-12-20

Applicant: LASERTEC CORPORATION

Inventor： Ko Gondaira

IPC: G02B21/00

Abstract: A confocal microscope includes a data acquisition unit configured to acquire a rough-shape data indicating a rough shape of a sample, an illumination light source configured to generate illumination light for illuminating the sample, an objective lens configured to concentrate the illumination light on the sample, an optical scanner configured to scan an illuminated place on the sample in a field of view of the objective lens, a stage configured to scan the illuminated place along the rough shape of the sample by changing a position of the objective lens relative to the sample, and an optical detector configured to detect reflected light through a confocal optical system, the reflected light being light that has been reflected on the sample and has passed through the objective lens.