公开(公告)号：US09612459B2

公开(公告)日：2017-04-04

申请号：US14321376

申请日：2014-07-01

Applicant: LaXense Inc.

Inventor： Ningning Feng ,  Xiaochen Sun

IPC: G02F1/25 ,  G02F1/225 ,  G02F1/025 ,  G02F1/015 ,  G02F1/21

CPC classification number: G02F1/025 ,  G02F1/2257 ,  G02F2001/0152 ,  G02F2001/212

Abstract: The invention provides methods of forming an optical device, in particular, a silicon optical modulator using shallow rib waveguide structure. According to the embodiments of the present invention, the silicon optical waveguide modulator includes a shallow rib waveguide with asymmetric shoulder heights disposed on a surface of a substrate; one side terminated by the waveguide edge and the other side terminated by a second laterally oriented PN junction, a first vertically oriented PN junction is positioned inside the light propagation region of the waveguide; and higher doping regions with the same type of doping type of the adjoining regions are positioned on the asymmetric shoulders outside the light propagation regions in electrical contact with metal contacts.

公开(公告)号：US20160313577A1

公开(公告)日：2016-10-27

申请号：US14694834

申请日：2015-04-23

Applicant: LaXense Inc.

Inventor： Xiaochen Sun ,  Ningning Feng

IPC: G02F1/025

CPC classification number: G02F1/025 ,  G02F2001/0151 ,  G02F2201/063 ,  G02F2202/104 ,  G02F2203/50

Abstract: An optical device includes a substrate and an optical rib waveguide structure formed of a slab and a rib. A vertically-oriented P-N-P or N-P-N dual-junction diode is formed inside the rib waveguide, including a first doped region, a second doped region and a third doped region electrically connected to the first doped region, where two P-N junctions are formed at the boundaries of the first and the second doped regions, and the second and the third doped regions, respectively. The depletion regions of the two junctions are substantially in the center of a guided optical mode propagating at the core region through the rib waveguide. The optical device further includes a first metal contact and a second metal contact in electrical contact with the first doped region and the second doped region, respectively.

Abstract translation: 光学装置包括基板和由平板和肋形成的光学波导结构。 在肋波导内形成垂直取向的PNP或NPN双结二极管，包括电连接到第一掺杂区的第一掺杂区，第二掺杂区和第三掺杂区，其中在边界处形成两个PN结 的第一和第二掺杂区域，以及第二和第三掺杂区域。 两个结的耗尽区基本上处于通过肋波导在芯区域传播的引导光模的中心。 光学装置还包括分别与第一掺杂区域和第二掺杂区域电接触的第一金属触点和第二金属触点。

公开(公告)号：US20170205580A1

公开(公告)日：2017-07-20

申请号：US14997532

申请日：2016-01-17

Applicant: LaXense Inc.

Inventor： Ningning Feng ,  Xiaochen Sun

IPC: G02B6/14 ,  G02B6/125

CPC classification number: G02B6/14 ,  G02B6/1228 ,  G02B6/125 ,  G02B6/2821 ,  G02B2006/12147

Abstract: An optical waveguide mode transformer device includes a first optical waveguide bend structure and a second optical waveguide bend structure formed by vertically stacked multiple layers of light transparent media. One of the core layers of the optical waveguide bends has a higher refractive index and the other has a lower refractive index. The waveguide centers of the two optical bend structures are de-centered. The bend structure having higher refractive index core layer terminates at a location of the mode transformer device between its two ends. With proper bend structure design, the optical power can be completely transferred from the high index waveguide to the low index waveguide with the help of such vertical stacked de-centered bend structure.

公开(公告)号：US20160116687A1

公开(公告)日：2016-04-28

申请号：US14524411

申请日：2014-10-27

Applicant: LAXENSE INC.

Inventor： Xiaochen Sun ,  Ningning Feng

IPC: G02B6/42

CPC classification number: G02B6/42 ,  G02B6/4224 ,  G02B6/4233 ,  G02B6/4238 ,  G02B6/4245 ,  G02B6/4249

Abstract: An optical device including an optical bench and an optical chip, the optical bench having multiple optical waveguides formed on its first side and the optical chip has multiple optical waveguides formed on its first side. The optical chip is flip-chip bonded onto the optical bench with its first side facing the first side of the optical bench. The distance between adjacent waveguides on the optical bench are designed to be slightly different from the distance between adjacent waveguides on the optical chip, where the latter usually is a pre-designed value under certain conventions. The difference amount is properly designed such that under reasonable misalignment between the optical chip and the optical bench in the in-plane direction perpendicular to waveguide propagation one can always find that one of the multiple waveguides is aligned sufficiently well with the corresponding waveguide on the optical chip.

Abstract translation: 一种包括光学台和光学芯片的光学装置，具有在其第一侧上形成的多个光波导的光学平台和光学芯片具有在其第一侧上形成的多个光波导。 光学芯片被倒装芯片贴合到光学工作台上，其第一面朝向光学台的第一侧。 光学平台上的相邻波导之间的距离被设计为与光学芯片上的相邻波导之间的距离稍微不同，其中后者通常在某些约定下是预先设计的值。 差分量被适当地设计，使得在垂直于波导传播的平面内方向上的光学芯片和光学平台之间的合理的不对准下，可以总是发现多个波导中的一个与光学上的相应波导充分良好对准 芯片。

公开(公告)号：US20160004104A1

公开(公告)日：2016-01-07

申请号：US14321376

申请日：2014-07-01

Applicant: LaXense Inc.

Inventor： Ningning Feng ,  Xiaochen Sun

IPC: G02F1/025 ,  G02F1/225

CPC classification number: G02F1/025 ,  G02F1/2257 ,  G02F2001/0152 ,  G02F2001/212

Abstract: The invention provides methods of forming an optical device, in particular, a silicon optical modulator using shallow rib waveguide structure. According to the embodiments of the present invention, the silicon optical waveguide modulator includes a shallow rib waveguide with asymmetric shoulder heights disposed on a surface of a substrate; one side terminated by the waveguide edge and the other side terminated by a second laterally oriented PN junction, a first vertically oriented PN junction is positioned inside the light propagation region of the waveguide; and higher doping regions with the same type of doping type of the adjoining regions are positioned on the asymmetric shoulders outside the light propagation regions in electrical contact with metal contacts.

Abstract translation: 本发明提供了形成光学器件的方法，特别是使用浅肋波导结构的硅光学调制器。 根据本发明的实施例，硅光波导调制器包括布置在衬底的表面上的具有不对称肩高的浅肋波导; 一侧由波导边缘终端，另一侧由第二横向取向的PN结终止，第一垂直取向的PN结位于波导的光传播区域的内部; 并且具有相同类型的邻接区域的相同类型的掺杂类型的较高掺杂区域位于与金属触点电接触的光传播区域外部的不对称肩部上。

公开(公告)号：US20170184883A1

公开(公告)日：2017-06-29

申请号：US15461398

申请日：2017-03-16

Applicant: LaXense Inc.

Inventor： Xiaochen Sun ,  Ningning Feng

IPC: G02F1/025

CPC classification number: G02F1/025 ,  G02F2001/0151 ,  G02F2201/063 ,  G02F2202/104 ,  G02F2203/50

Abstract: An optical device includes a substrate and an optical rib waveguide structure formed of a slab and a rib. A vertically-oriented P-N-P or N-P-N dual-junction diode is formed inside the rib waveguide, including a first doped region, a second doped region and a third doped region electrically connected to the first doped region, where two P-N junctions are formed at the boundaries of the first and the second doped regions, and the second and the third doped regions, respectively. The depletion regions of the two junctions are substantially in the center of a guided optical mode propagating at the core region through the rib waveguide. The optical device further includes a first metal contact and a second metal contact in electrical contact with the first doped region and the second doped region, respectively.

公开(公告)号：US09513435B1

公开(公告)日：2016-12-06

申请号：US14886614

申请日：2015-10-19

Applicant: LaXense Inc.

Inventor： Xiaochen Sun ,  Ningning Feng

IPC: G02B6/12 ,  G02B6/136

CPC classification number: G02B6/12002 ,  G02B6/12004 ,  G02B6/136 ,  G02B6/264 ,  G02B6/4237 ,  G02B6/4244 ,  G02B6/4257 ,  G02B6/43 ,  G02B2006/12061 ,  G02B2006/12078 ,  G02B2006/12152

Abstract: An optical device includes an optical bench and two flip-chip bonded optical chips. The optical bench includes a large area slab waveguide structure which has an input facet facing the first optical chip, an output facet facing the second optical chip, and one or more curved facet which reflects the slab mode light such that the input optical mode coupled through the input facet diverges in the slab waveguide plane as it propagates, reflects at the one or more curved facets, and focuses to an output optical mode at the output facet with mode size larger than the input optical mode in the in-plane direction. During fabrication, after the first optical chip is flip-chip bonded, the location of the focused output optical mode on the output facet is determined, and then the second optical chip is flip-chip bonded based on the determined location of the output optical mode.

Abstract translation: 光学装置包括光学台和两个倒装芯片结合的光学芯片。 光学台包括大面积平板波导结构，其具有面向第一光学芯片的输入面，面向第二光学芯片的输出面，以及一个或多个反射板模式光的弯曲面，使得输入光学模式耦合到 输入刻面在平板波导平面中传播时发散，在一个或多个弯曲面处反射，并在模式尺寸大于在平面内方向上的输入光学模式的情况下，将焦点聚焦到输出侧的输出光学模式。 在制造期间，在第一光学芯片被倒装芯片接合之后，确定聚焦输出光学模式在输出端面上的位置，然后基于确定的输出光学模式的位置来将第二光学芯片倒装芯片接合 。

公开(公告)号：US09134490B2

公开(公告)日：2015-09-15

申请号：US13706674

申请日：2012-12-06

Applicant: LaXense Inc.

Inventor： Ningning Feng ,  Xiaochen Sun

IPC: G02B6/42 ,  G02B6/36

CPC classification number: G02B6/423 ,  G02B6/4202 ,  G02B6/4243 ,  G02B6/4246 ,  G02B6/4249 ,  G02B6/4274

Abstract: The invention provides an optical system, in particular, a multi-channel parallel optical transceiver system and methods of forming the same. The multi-channel parallel optical system includes a first substrate with at least one optical component mounted on its first side, a second substrate with optical fibers affixed in fiber fixing structures (grooves), the second substrate being mounted on the first side of the first substrate perpendicular to the first side of the first substrate so that the optical signal can be transmitted and received between the optical fibers and the mounted optical components with minimum loss. Passive alignment assembly is realized by using a series of alignment pins and holes and/or grooves pre-fabricated on the substrates. The optical systems may additionally include other structures to provide additional functionalities, in-line monitor photodetectors, and mechanical support or substrate elevation.

Abstract translation: 本发明提供一种光学系统，特别是多通道并行光收发器系统及其形成方法。 多通道并行光学系统包括：第一基板，其具有安装在其第一侧上的至少一个光学元件;第二基板，光纤固定在光纤固定结构（凹槽）中;第二基板安装在第一侧 衬底，其垂直于第一衬底的第一侧，使得光信号可以以最小的损耗在光纤和安装的光学部件之间传输和接收。 无源对准组件通过使用一系列在基板上预制的对准销和孔和/或沟槽来实现。 光学系统可以另外包括提供附加功能的其他结构，在线监视器光电检测器，以及机械支撑或衬底升高。

公开(公告)号：US20140124669A1

公开(公告)日：2014-05-08

申请号：US13670254

申请日：2012-11-06

Applicant: LAXENSE INC.

Inventor： Dawei Zheng ,  Ningning Feng ,  Xiaochen Sun

IPC: G02B6/12 ,  G01J5/02 ,  H01L21/02

CPC classification number: G02B6/12004

Abstract: A Ge waveguide photo-detector fabricated on a silicon-on-insulator substrate is provided. It comprises a Ge waveguide detector end-coupled to a light-signal-carrying silicon waveguide, both disposed on a silicon-on-insulator (SOI) substrate. An electrical field is established along the direction of light propagation inside the Ge waveguide detector by doping the two opposite ends of the Ge detector with P or N type dopants. In result the height and width of the Si waveguide is decoupled from the speed of the Ge detector.

Abstract translation: 提供了制造在绝缘体上硅衬底上的Ge波导光电探测器。 它包括端接耦合到携带光信号的硅波导的Ge波导检测器，两者都设置在绝缘体上硅（SOI）衬底上。 沿着Ge波导检测器内的光传播方向建立电场，通过用P或N型掺杂剂掺杂Ge检测器的两个相对端。 结果，Si波导的高度和宽度与Ge检测器的速度分离。

公开(公告)号：US09323011B1

公开(公告)日：2016-04-26

申请号：US14734857

申请日：2015-06-09

Applicant: LaXense Inc.

Inventor： Ningning Feng ,  Xiaochen Sun

IPC: G02B6/12 ,  G02B6/26 ,  G02B6/42 ,  G02B6/125

CPC classification number: G02B6/4225 ,  G02B6/125 ,  G02B6/42 ,  G02B6/4202 ,  G02B6/4224 ,  G02B6/4227 ,  G02B6/4233 ,  G02B6/4238 ,  G02B6/4245

Abstract: A hybrid optical device includes an optical bench chip, a laser chip with a laser waveguide flip-chip bonded onto the optical bench chip, and an optical waveguide chip with an optical device waveguide disposed adjacent the optical bench chip. The optical bench chip has multiple “U” shaped alignment optical waveguides and the optical waveguide chip has multiple alignment optical waveguides, and the pitches of the various sets of alignment waveguides are different. A misalignment between the laser waveguide and the optical bench chip is compensated for by aligning the optical waveguide chip to different positions of the optical bench chip using the multiple alignment optical waveguides on the optical bench chip and the optical waveguide chip, without turning on the laser, so that the laser waveguide of the laser chip is aligned with the optical device waveguide of the optical device chip.

Abstract translation: 混合光学装置包括光学台式芯片，具有结合到光学台架芯片上的激光波导倒装芯片的激光芯片，以及配置在光学台架芯片附近的具有光学器件波导的光波导芯片。 光学台架芯片具有多个“U”形对准光波导，光波导芯片具有多个对准光波导，各组对准波导的间距不同。 通过使用光学台架芯片和光波导芯片上的多个取向光波导将光波导芯片对准光学台架芯片的不同位置来补偿激光波导和光学台架芯片之间的未对准，而不打开激光器 使得激光芯片的激光波导与光学器件芯片的光学器件波导对准。