公开(公告)号：US20220189744A1

公开(公告)日：2022-06-16

申请号：US17681606

申请日：2022-02-25

Applicant: Lam Research Corporation

Inventor： Hiran Rajitha RATHNASINGHE ,  Shawn TOKAIRIN ,  Jon MCCHESNEY

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/687

Abstract: A middle ring configured to be arranged on a bottom ring and to support a moveable edge ring and further configured to be raised and lowered relative to a substrate support includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, a guide feature in the upper surface defining the annular outer diameter, an inner annular rim in the upper surface defining the annular inner diameter, and a groove defined in the upper surface between the guide feature and the inner annular rim.

公开(公告)号：US20220189745A1

公开(公告)日：2022-06-16

申请号：US17681633

申请日：2022-02-25

Applicant: Lam Research Corporation

Inventor： Hiran Rajitha RATHNASINGHE ,  Shawn TOKAIRIN ,  Jon MCCHESNEY

IPC: H01J37/32 ,  H01L21/67 ,  H01L21/687

Abstract: A bottom ring is configured to support a moveable edge ring that is configured to be raised and lowered relative to a substrate support. The bottom ring includes an upper surface that is stepped, an annular inner diameter, an annular outer diameter, a lower surface, a plurality of vertical guide channels provided through the bottom ring from the lower surface to the upper surface of the bottom ring, each of the guide channels including a first region having a smaller diameter than the guide channel and being configured to receive respective lift pins for raising and lowering the edge ring, and a guide feature extending upward from the upper surface of the bottom ring.