公开(公告)号：US20030030998A1

公开(公告)日：2003-02-13

申请号：US10186332

申请日：2002-06-28

Applicant: MEMSCAP

Inventor： Ahmed Mhani ,  Jean-Marc Fedeli

IPC: H05K007/02 ,  H05K007/06 ,  H05K007/08 ,  H05K007/10

CPC classification number: H03H9/02259 ,  H01H50/005 ,  H01H59/0009 ,  H03H9/2405 ,  H03H2009/02496

Abstract: Microelectromechanical component (1) providing filtering functions, produced on a semiconductor-based substrate, and comprising two input terminals and two output terminals, characterized in that it also comprises: a moveable element (4) connected to the substrate by at least one deformable portion, and including a region made of a ferromagnetic material; a metal coil (5) connected to the input terminals or output terminals (30, 31), capable of interacting magnetically with the ferromagnetic region of the moveable element (4); a surface forming a first electrode (6), connected to one of the output terminals or input terminals, placed opposite a complementary surface secured to the moveable element (4), this complementary surface forming a second electrode connected to the other of the output or input terminals, and being capable of interacting electrostatically with the first electrode (6).

Abstract translation: 提供过滤功能的微电子机械部件（1），其在半导体基板上制造，并且包括两个输入端子和两个输出端子，其特征在于还包括：可移动元件（4），其通过至少一个可变形部分 并且包括由铁磁材料制成的区域; 连接到能够与可移动元件（4）的铁磁区域相互作用的输入端子或输出端子（30,31）的金属线圈（5）; 形成第一电极（6）的表面，其连接到与固定到所述可移动元件（4）的互补表面相对的所述输出端子或输入端子之一，所述互补表面形成连接到所述输出端或另一端的另一个的第二电极 输入端子，并且能够与第一电极（6）静电相互作用。

公开(公告)号：US20020047769A1

公开(公告)日：2002-04-25

申请号：US09943604

申请日：2001-08-30

Applicant: Memscap S.A.

Inventor： Jean-Marc Fedeli

IPC: H01F038/20

CPC classification number: B82Y25/00 ,  H01F10/3218 ,  H01F10/3286 ,  H01F17/0033

Abstract: Inductive microcomponent (1), such as a microinductor or microtransformer, comprising a metal winding (2) having the shape of a solenoid, and a magnetic core (4) including a strip made of a ferromagnetic material, positioned at the center of the solenoid (2), and characterized in that the core comprises at least one additional strip made of a ferromagnetic material (13), separated from the other strip (12) by a spacer layer (14) made of a non-magnetic material, the thickness of which is such that the strips (12, 13) located on either side of the spacer layer (14) are antiferromagnetically coupled.

Abstract translation: 包括具有螺线管形状的金属绕组（2）的微电子或微型变压器的感应微元件（1）和包括由铁磁材料制成的带的磁芯（4）位于螺线管的中心 （2），其特征在于，所述芯包括由铁磁材料（13）制成的至少一个附加带，所述铁磁材料通过由非磁性材料制成的间隔层（14）与另一条带（12）分离，所述厚度 位于间隔层（14）的任一侧上的条（12,13）被反铁磁耦合。

公开(公告)号：US20030030527A1

公开(公告)日：2003-02-13

申请号：US10213928

申请日：2002-08-06

Applicant: MEMSCAP Parc Technologique des Fontaines

Inventor： Ahmed Mhani ,  Jean-Marc Fedeli

IPC: H01F021/06

CPC classification number: H03H9/02259 ,  H03H9/02377 ,  H03H2009/02496

Abstract: A microelectromechanical component (1) providing filtering functions, produced on a semiconductor-based substrate (10) and comprising two input terminals (7, 8) and two output terminals (26, 27), which also comprises: a metal input coil (2), connected to the input coils (7, 8) and capable of producing a magnetic field when a current flows through it; a movable element (3), connected to the substrate by at least one deformable portion and including at least one region (11, 12) made of a ferromagnetic material, said movable element (3) being capable of moving under the effect of the force, to which the region (11) made of a ferromagnetic material is subject, generated by the magnetic field produced by the input coil (2); an output member (4) forming a magnetic sensor, connected to the output terminals (26, 27) and capable of producing an electrical signal that can be varied according to the movement of the movable element (3).

Abstract translation: 一种提供过滤功能的微机电部件（1），其在基于半导体的基板（10）上产生并且包括两个输入端子（7,8）和两个输出端子（26,27），其还包括：金属输入线圈 ），连接到输入线圈（7,8），并且当电流流经时产生磁场; 可移动元件（3），其通过至少一个可变形部分连接到所述基板并且包括由铁磁材料制成的至少一个区域（11,12），所述可移动元件（3）能够在所述力的作用下移动 由铁磁材料制成的区域（11）由输入线圈（2）产生的磁场产生; 形成磁传感器的输出构件（4），连接到输出端子（26,27），并且能够产生可根据可移动元件（3）的移动而改变的电信号。

公开(公告)号：US20020050906A1

公开(公告)日：2002-05-02

申请号：US09870819

申请日：2001-05-31

Applicant: MEMSCAP, S.A.

Inventor： Jean-Marc Fedeli ,  Bertrand Guillon

IPC: H01F038/20

CPC classification number: H01F3/14 ,  H01F17/0006 ,  H01F17/0033 ,  H01F27/34

Abstract: Inductive microcomponent (1), such as a microinductor or microtransformer, comprising a metal winding (2) having the shape of a solenoid and a magnetic core (4) made of a ferromagnetic material positioned at the center of the solenoid (2), wherein the core (4) consists of several sections (13-16) separated by cutouts (17-19) oriented parallel to the main axis (20) of the solenoid (4).

Abstract translation: 包括具有螺线管形状的金属绕组（2）和位于螺线管（2）中心的铁磁材料制成的磁芯（4）的微电感器或微型变压器的感应微元件（1），其中 芯部（4）包括由平行于螺线管（4）的主轴线（20）定向的切口（17-19）分开的几个部分（13-16）。