公开(公告)号：US20160233055A1

公开(公告)日：2016-08-11

申请号：US14616431

申请日：2015-02-06

Applicant: MKS Instruments Inc.

Inventor： Shaun Smith ,  Steven R. Walther

IPC: H01J37/32 ,  H05H1/46

CPC classification number: H01J37/3244 ,  H01J37/32009 ,  H01J37/32357 ,  H01J37/32458 ,  H05H1/46 ,  H05H2001/466

Abstract: Methods and apparatus for igniting a process plasma within a plasma chamber are provided. A quantity of metastable atoms generated within a metastable generation volume are provided along with an ignition gas to a plasma generation volume defined by a plasma chamber. The quantity of metastable atoms generated is sufficient to allow at least a predetermined quantity of the metastable atoms to flow from a first location within the plasma generation volume to a second location within the plasma generation volume. A process plasma is ignited within the plasma generation volume by applying an electric field to the plasma generation volume that includes the metastable atoms flowed therein.

Abstract translation: 提供了用于点燃等离子体室内的处理等离子体的方法和装置。 在亚稳态产生体积内产生的亚稳态原子数量与点火气体一起提供给由等离子体室限定的等离子体产生体积。 产生的亚稳态原子的量足以允许至少预定量的亚稳原子从等离子体产生体积内的第一位置流入等离子体产生体积内的第二位置。 通过对包括其中流动的亚稳原子的等离子体产生体积施加电场，在等离子体产生体积内点燃过程等离子体。

公开(公告)号：US11009843B2

公开(公告)日：2021-05-18

申请号：US16297799

申请日：2019-03-11

Applicant: MKS Instruments, Inc.

Inventor： David J. Coumou ,  Yuriy Elner ,  Aung Toe ,  Daniel M. Gill ,  Eldridge M. Mount, IV ,  Shaun Smith

IPC: G05B19/042 ,  H01L21/67 ,  H01J37/32

Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.

公开(公告)号：US11531312B2

公开(公告)日：2022-12-20

申请号：US17232950

申请日：2021-04-16

Applicant: MKS Instruments, Inc.

Inventor： David J. Coumou ,  Yuriy Elner ,  Aung Toe ,  Daniel M. Gill ,  Eldridge M. Mount, IV ,  Shaun Smith

IPC: G05B19/042 ,  H01L21/67 ,  H01J37/32

Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.

公开(公告)号：US11042140B2

公开(公告)日：2021-06-22

申请号：US16297799

申请日：2019-03-11

Applicant: MKS Instruments, Inc.

Inventor： David J. Coumou ,  Yuriy Elner ,  Aung Toe ,  Daniel M. Gill ,  Eldridge M. Mount, IV ,  Shaun Smith

IPC: G05B19/042 ,  H01L21/67 ,  H01J37/32

Abstract: A power supply control system includes a power generator for providing a signal to a load. The power generator includes a power controller controlling a power amplifier. The power generator includes an adaptive controller for varying the output signal controlling the power amplifier. The adaptive controller compares an error between a measured output and a predicted output to determine adaptive values applied to the power controller. The power generator also includes a sensor that generates an output signal that is digitized and processed. The sensor signal is mixed with a constant K. The constant K is varied to vary the processing of the sensor output signal. The value K may be commutated based on the phase, frequency, or both phase and frequency, and the bandwidth of K is determined by coupled power in the sensor output signal.

公开(公告)号：US10553403B1

公开(公告)日：2020-02-04

申请号：US16406339

申请日：2019-05-08

Applicant: MKS Instruments, Inc.

Inventor： Paul Michael Meneghini ,  Shaun Smith

IPC: H01J7/24 ,  H01J37/32

Abstract: A plasma source is provided that includes multiple metallic blocks. A toroidal plasma chamber and a transformer are substantially embedded in the metallic blocks. The toroidal plasma chamber includes a gas inlet configured to receive a process gas and a gas outlet configured to expel at least a portion of the process gas from the plasma chamber. The plasma chamber also includes multiple linear channel segments, multiple joints, an inlet joint, and an outlet joint machined into the metallic blocks. Each of the inlet joint, the outlet joint, and the joints connects a pair of the linear channel segments. The linear channel segments, the joints, the inlet joint and the outlet joint in combination form the toroidal plasma chamber. The gas inlet is disposed on the inlet joint. The gas outlet is disposed on the outlet joint. An inner angle of each of the joints is greater than about 90 degrees.