公开(公告)号：US10048844B2

公开(公告)日：2018-08-14

申请号：US14996282

申请日：2016-01-15

Applicant: MPI Corporation

Inventor： Stojan Kanev ,  Yung-Chin Liu ,  Andrej Rumiantsev ,  Yao-Chuan Chiang

IPC: G06F3/0484 ,  G06F3/041 ,  G06F3/0488 ,  G01R31/28 ,  G03F7/20 ,  G01N21/95

Abstract: The instant disclosure provides an operating method of inspecting equipment, with the method applicable to semiconductor inspecting equipment having a movable element. The method includes: displaying a wafer graphic by a touch display; detecting a touch signal generated by the touch display; detecting the magnification of the wafer graphic when the touch signal is generated; and determining the moving speed of the movable element based on the magnification of the wafer graphic when the touch signal is generated. In addition, the moving direction of the movable element can be determined according to the touch signal. Through the instant disclosure, the operator can more intuitively operate each movable element of semiconductor inspecting equipment.