Abstract:
The invention relates to a device for spraying a surface of a substrate, wherein the device comprises at least one first spray nozzle for the supply of a fluid to the surface of the substrate to be treated and the first spray nozzle is arranged at a first distance from the substrate, wherein at least one second spray nozzle is arranged at a second distance from the substrate and a ratio of the second distance to the first distance is in a range from 0.1 to 0.8. At most a first volume flow of the fluid can be passed through the at least one first spray nozzle and at most a second volume flow of the fluid can be passed through the at least one second spray nozzle, wherein the ratio of the second volume flow to the first volume flow is in a range from 0.005 to 0.5.
Abstract:
In a method for wet-chemical treatment of surfaces of a material. a pulse-like spray jet of treatment fluid is directed against the surface of the material. This causes a pronounced impact action against the base of a structure to be processed so that the amount of treatment time which is necessary is substantially reduced. The pressure-free and accelerated outflow of the treatment fluid from the structure channels in the pauses between pulses results in the flanks of the structures or circuit-board conductors being subjected to less wet-chemical processing than in the prior art. In case of chemical etching the result is a smaller undercutting.