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公开(公告)号:US20180154393A1
公开(公告)日:2018-06-07
申请号:US15598890
申请日:2017-05-18
Applicant: Masdar Institute of Science and Technology
Inventor: Jaime VIEGAS , Mateusz MADZIK , Aveek Nath CHATTERJEE
CPC classification number: B06B1/0629 , B06B1/0238 , B06B1/0622 , B06B2201/55 , G10K11/345 , H01L41/047 , H01L41/0472 , H01L41/0805 , H01L41/0973
Abstract: An ultrasonic transducer and a method for a transmitting an acoustic wave using an ultrasonic transducer comprising a membrane; two or more patterned top electrodes; a pMUT array, wherein the patterned top electrode is arranged as row pin selector and column selector in an N×N array; the pMUT array having N+N electrical contacts; a single unpatterned bottom electrode; a row and column where the electrode is at equal or opposite polarities; and a AC driving voltage is applied to top electrodes with a phase difference of zero or is applied to one electrode to transmit the ultrasonic wave.