公开(公告)号：US11688756B2

公开(公告)日：2023-06-27

申请号：US16684917

申请日：2019-11-15

Applicant: Massachusetts Institute of Technology

Inventor： Jordan Goldstein ,  Dirk Robert Englund

IPC: H01L27/14 ,  H01L27/146 ,  H01L29/16 ,  H01Q21/06 ,  H04N5/33 ,  H01G9/20 ,  H10N19/00

CPC classification number: H01L27/14649 ,  H01G9/2004 ,  H01L29/1606 ,  H01Q21/064 ,  H04N5/33 ,  H10N19/00

Abstract: A filter-based color imaging array that resolves N different colors detects only 1/Nth of the incoming light. In the thermal infrared wavelength range, filtering loss is exacerbated by the lower sensor detectivity at infrared wavelengths than at visible wavelengths. To avoid loss due to filtering, most spectral imagers use bulky optics, such as diffraction gratings or Fourier transform interferometers, to resolve different colors. Fortunately, it is possible to avoid filtering loss without bulky optics: detect light with interleaved arrays of sub-wavelength-spaced antennas tuned to different wavelengths. An optically sensitive element inside each antenna absorbs light at the antenna's resonant wavelength. Metallic slot antennas offer high efficiency, intrinsic unidirectionality, and lower cross-talk than dipole or bowtie antennas. Graphene serves at the optically active material inside each antenna because its 2D nature makes it easily adaptable to this imager architecture.

公开(公告)号：US11635330B2

公开(公告)日：2023-04-25

申请号：US17335017

申请日：2021-05-31

Applicant: Massachusetts Institute of Technology

Inventor： Jordan Goldstein ,  Christopher Louis Panuski ,  Dirk Robert Englund

IPC: G01J5/08 ,  G01J5/0818 ,  G01J5/34

Abstract: Optical microcavity resonance measurements can have readout noise matching the fundamental limit set by thermal fluctuations in the cavity. Small-heat-capacity, wavelength-scale microcavities can be used as bolometers that bypass the limitations of other bolometer technologies. The microcavities can be implemented as photonic crystal cavities or micro-disks that are thermally coupled to strong mid-IR or LWIR absorbers, such as pyrolytic carbon columns. Each microcavity and the associated absorber(s) rest on hollow pillars that extend from a substrate and thermally isolate the cavity and the absorber(s) from the rest of the bolometer. This ensures that thermal transfer to the absorbers is predominantly from radiation as opposed to from conduction. As the absorbers absorb thermal radiation, they shift the resonance wavelength of the cavity. The cavity transduces this thermal change into an optical signal by reflecting or scattering more (or less) near-infrared (NIR) probe light as a function of the resonance wavelength shift.

公开(公告)号：US20220236113A1

公开(公告)日：2022-07-28

申请号：US17335017

申请日：2021-05-31

Applicant: Massachusetts Institute of Technology

Inventor： Jordan Goldstein ,  Christopher Louis Panuski ,  Dirk Robert ENGLUND

IPC: G01J5/08 ,  G01J5/34

Abstract: Optical microcavity resonance measurements can have readout noise matching the fundamental limit set by thermal fluctuations in the cavity. Small-heat-capacity, wavelength-scale microcavities can be used as bolometers that bypass the limitations of other bolometer technologies. The microcavities can be implemented as photonic crystal cavities or micro-disks that are thermally coupled to strong mid-IR or LWIR absorbers, such as pyrolytic carbon columns. Each microcavity and the associated absorber(s) rest on hollow pillars that extend from a substrate and thermally isolate the cavity and the absorber(s) from the rest of the bolometer. This ensures that thermal transfer to the absorbers is predominantly from radiation as opposed to from conduction. As the absorbers absorb thermal radiation, they shift the resonance wavelength of the cavity. The cavity transduces this thermal change into an optical signal by reflecting or scattering more (or less) near-infrared (NIR) probe light as a function of the resonance wavelength shift.