公开(公告)号：US11287514B2

公开(公告)日：2022-03-29

申请号：US16149256

申请日：2018-10-02

Applicant: Melexis Technologies NV

Inventor： Gaetan Koers ,  Wouter Leten ,  Sam Maddalena ,  Ross Kay

IPC: G01S7/481 ,  G01S17/02 ,  H01L31/12 ,  H01L27/146 ,  G01S17/04

Abstract: A sensor device (100) comprises an emitter device (106) arranged to emit electromagnetic radiation and having an emission region associated therewith. The sensor device (100) also comprises a detector device (108) arranged to receive electromagnetic radiation and having a detection region associated therewith, and an optical system (122). The emission region is spaced at a predetermined distance from the detection region. The optical system (122) defines a plurality of principal rays, a number of the plurality of principal rays intersecting the detection region. The number of the plurality of principal rays also intersect the emission region.

公开(公告)号：US11815452B2

公开(公告)日：2023-11-14

申请号：US17064716

申请日：2020-10-07

Applicant: Melexis Technologies NV

Inventor： Wouter Leten ,  Joris Roels ,  Xiaoning Jia ,  Roeland Baets ,  Gunther Roelkens

IPC: G01N21/3504 ,  G01N21/31 ,  G01N21/05 ,  G01N21/17 ,  G01N21/01

CPC classification number: G01N21/3504 ,  G01N21/314 ,  G01N2021/0112 ,  G01N2021/052 ,  G01N2021/1751 ,  G01N2021/3166

Abstract: A gas sensor device (100) is configured to measure a predetermined gas of interest and comprises an enclosure (101) comprising a semiconductor substrate (102) and defining a first cavity (124), an optically transmissive second closed cavity (126) and a third cavity (128). The second cavity (126) is interposed between the first and third cavities (124, 128). The first cavity (124) comprises an inlet port (130) for receiving a gas under test, an outlet port (132) for venting the gas under test. The first cavity (124) also comprises an optical source (112) and a measurement sensor (114). The second cavity (126) is configured as a gaseous filter comprising a volume of the gas of interest sealingly disposed in the second cavity (126), and the third cavity (128) comprises a reference measurement sensor (116) disposed therein.