公开(公告)号：US11982377B1

公开(公告)日：2024-05-14

申请号：US18050899

申请日：2022-10-28

Applicant: Meta Platforms Technologies, LLC

Inventor： Daniel Myers ,  Serol Turkyilmaz ,  Ali Darvishian ,  Robert Manson

IPC: F16K99/00 ,  F16K3/28 ,  F16K7/12 ,  F16K7/17 ,  F16K31/126 ,  F16K31/165 ,  F16K41/12

CPC classification number: F16K99/0015 ,  F16K3/28 ,  F16K7/12 ,  F16K7/17 ,  F16K31/126 ,  F16K31/165 ,  F16K41/12 ,  F16K99/0003 ,  F16K99/0025 ,  F16K99/0057 ,  F16K2099/0082 ,  F16K2099/0094

Abstract: Fluidic devices may include a monolithic gate substrate and a channel substrate coupled to the monolithic gate substrate. The monolithic gate substrate may include a gate chamber and a flexible membrane located adjacent to the gate chamber. The channel substrate may include a source channel and a drain channel that are in fluid communication with the flexible membrane on an opposite side of the flexible membrane from the gate chamber. Various other related devices, systems, and methods are also disclosed.