公开(公告)号：US20170102326A1

公开(公告)日：2017-04-13

申请号：US15386613

申请日：2016-12-21

Applicant: Murata Manufacturing Co., Ltd.

Inventor： JUNYA KOMODA ,  Kansho Yamamoto

IPC: G01N21/3504 ,  G01N33/00

CPC classification number: G01N21/3504 ,  G01J5/0831 ,  G01J5/0853 ,  G01J5/0862 ,  G01J5/12 ,  G01J2003/421 ,  G01N21/314 ,  G01N33/0009 ,  H01L35/22 ,  H01L37/02

Abstract: A thermal infrared sensor for gas measurement including a sensing element. The sensing element includes a thermal detection layer that outputs an electric signal based on a temperature change, a light-receiving surface electrode disposed on a light-receiving surface of the thermal detection layer, and a back electrode disposed on the thermal detection layer opposite the light-receiving surface electrode. The light-receiving surface electrode has a periodic structure configured to selectively absorb infrared light having an absorption wavelength of a sample gas.