公开(公告)号：US20160101975A1

公开(公告)日：2016-04-14

申请号：US14972237

申请日：2015-12-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hidekazu Ono ,  Tsuyoshi OKAMI ,  Nobuaki TSUJI ,  Yuki UEYA

IPC: B81B3/00 ,  G01C19/5712

CPC classification number: B81B3/0045 ,  B81B3/0056 ,  B81B2201/0221 ,  B81B2203/0127 ,  B81B2203/0163 ,  B81B2203/019 ,  B81B2203/0307 ,  B81B2203/04 ,  B81B2203/053 ,  G01C19/56 ,  G01C19/5712 ,  G01C19/5733

Abstract: A resonance frequency adjustment module is disclosed forming a MEMS sensor for detecting an angular velocity. The resonance frequency adjustment module includes a movable electrode; a fixed electrode facing the movable electrode to form a capacitor; and an elastic body supporting the movable electrode so as to be displaceable in one direction. The movable electrode and the fixed electrode have surfaces facing each other to form a capacitor, and the surface can be inclined to a displacement direction. A region sandwiched between the movable electrode and the fixed electrode has a volume fixed region where the volume is not decreased by movement of the movable electrode.

Abstract translation: 公开了一种形成用于检测角速度的MEMS传感器的共振频率调节模块。 共振频率调节模块包括可动电极; 面向可动电极的固定电极以形成电容器; 以及弹性体，其支撑所述可动电极，以便能够在一个方向上移位。 可动电极和固定电极具有彼此面对以形成电容器的表面，并且该表面可以沿位移方向倾斜。 夹在可动电极和固定电极之间的区域具有通过可移动电极的移动而不减小体积的体积固定区域。