公开(公告)号：US20170230653A1

公开(公告)日：2017-08-10

申请号：US15502975

申请日：2015-08-11

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Junya TSUTSUMI ,  Satoshi MATSUOKA ,  Toshikazu YAMADA ,  Tatsuo HASEGAWA

IPC: H04N17/00 ,  H01L51/00 ,  H01L27/28

CPC classification number: H04N17/004 ,  G01M11/00 ,  G02F1/1368 ,  G02F2001/136254 ,  G09F9/00 ,  H01L27/283 ,  H01L29/786 ,  H01L29/808 ,  H01L29/812 ,  H01L51/0031 ,  H01L51/0508 ,  H01L51/0541 ,  H01L51/0545

Abstract: To provide an inspection device and an inspection method which are capable of detecting a disconnection defect in an organic TFT array and/or evaluating a variation in the output properties and response speed of each organic TFT element. There are provided a device and a method of optically measuring the presence or absence of the accumulation of carriers in an organic semiconductor thin film which provides a channel layer of an organic TFT element. A source and a drain in each organic TFT are short-circuited to each other, a voltage is turned on and turned off in a predetermined period between this and a gate, and images before and after application of the voltage are captured in synchronization with the predetermined period while radiating monochromatic light, to obtain a differential image.