公开(公告)号：US20230134647A1

公开(公告)日：2023-05-04

申请号：US17912659

申请日：2021-03-16

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Katsuhisa MURAKAMI ,  Masayoshi NAGAO

IPC: H01J1/312 ,  H01J1/90 ,  H01J9/02 ,  C23C16/34

Abstract: Provided in the present disclosure is an electron emitting element 10 including a laminated structure in which a first electrode 1, an electron accelerating layer 6 made of an insulation film, a second electrode 3, and a cover film 7 are laminated in that order, in which the second electrode is an electrode which transmits electrons and emits electrons from a surface thereof, and the cover film is a film which transmits electrons, is a protective film made of a material different from that of the second electrode, and constitutes an electron emission surface 5.

公开(公告)号：US20220216026A1

公开(公告)日：2022-07-07

申请号：US17609445

申请日：2020-03-23

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Katsuhisa MURAKAMI ,  Masayoshi NAGAO

IPC: H01J1/308 ,  H01J1/312

Abstract: An electron emission device having a narrow electron energy range and excellent electron emitting efficiency, and an electron microscope using the electron emission device. An electron emission device having a laminated structure in which a first electrode, an electron accelerating layer made of an insulating film, and a second electrode are laminated in this order, in which the second electrode through which electrons transmit and from whose surface electrons emit, and the energy width of the emitted electrons is 100 meV or more and 600 meV or less. For example, graphene having one or more layers and 20 layers or less can be used as the second electrode, and hexagonal boron nitride can be used as the insulating film.