公开(公告)号：US20190212130A1

公开(公告)日：2019-07-11

申请号：US16328309

申请日：2017-06-01

Applicant: NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY

Inventor： Qinghua WANG ,  Shien RI ,  Hiroshi TSUDA

IPC: G01B11/16 ,  G01J9/02 ,  G01B11/25

CPC classification number: G01B11/161 ,  G01B11/16 ,  G01B11/25 ,  G01B11/254 ,  G01J9/02 ,  G01J2009/0234 ,  G01N21/45

Abstract: In a conventional moiré method, achieving both measurement accuracy and dynamic measurement and balancing field of view and measurement accuracy have been difficult. The present invention makes it possible to handle conventional moiré fringes as a grating for generating phase-shifted second-order moiré fringes, use a spatial phase shift method algorithm to accurately analyze the phases of the second-order moiré fringes before and after deformation, and determine shape from the phase differences between gratings projected onto the surface of an object of measurement and a reference surface and determine deformation and strain from the phase differences between the second-order moiré fringes, before and after deformation, of a repeating pattern on the object surface or a produced grating. As a result, it is possible to measure the three-dimensional shape and deformation distribution of an object accurately and with a wide field of view or dynamically and with a high degree of accuracy.