公开(公告)号：US20250010425A1

公开(公告)日：2025-01-09

申请号：US18897639

申请日：2024-09-26

Applicant: NHK SPRING CO., LTD.

Inventor： Masahiro FUJII ,  Daisuke FUJINO ,  Yoshihito ARAKI ,  Naoya AIKAWA ,  Nobuyuki FURUGORI ,  Tomonori KASONO

IPC: B24B37/04

Abstract: A polishing device according to an embodiment comprises: a supporting unit for supporting a polishing tool, a stage for holding an object to be polished; a first drive unit for causing the support unit and the stage to move relative to one another along a shape of a polishing surface of the object to be polished, and a second drive unit for causing the support unit to control synchronously with the first drive unit such that one predetermined end of a polishing member attached to the polishing tool faces in a movement direction of the polishing member.

公开(公告)号：US20250159765A1

公开(公告)日：2025-05-15

申请号：US19006584

申请日：2024-12-31

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya AIKAWA ,  Naoya KIDA ,  Jun FUTAKUCHIYA ,  Daisuke FUJINO ,  Masaya TAKANASHI

IPC: H05B3/48 ,  H05B3/04 ,  H05B3/28

Abstract: A sheath heater includes a metal sheath, a heater wire disposed in the metal sheath, an insulating material filled in the metal sheath so as to separate the metal sheath and the heater wire, a lead wire for supplying power to the heater wire, a crimp sleeve connecting the heater wire extending from an end of the metal sheath with the lead wire, a cylindrical member covering the end of the metal sheath, and a lid member engaging with the cylindrical member and including an opening into which the lead wire is inserted. The crimp sleeve is disposed in the cylindrical member. The end of the metal sheath includes a first insulating tube including a first through hole into which the heater wire is inserted and a sealing material filling a gap between the metal sheath and the first insulating tube. The sealing material includes a ceramic binder.

公开(公告)号：US20240032156A1

公开(公告)日：2024-01-25

申请号：US18374271

申请日：2023-09-28

Applicant: NHK SPRING CO., LTD.

Inventor： Naoya KIDA ,  Jun FUTAKUCHIYA ,  Daisuke FUJINO ,  Yuki TANI

IPC: H05B3/56 ,  H05B3/18

CPC classification number: H05B3/56 ,  H05B3/18 ,  H05B2203/016

Abstract: A sheathed heater with improved reliability is provided. Alternatively, a substrate support device including the sheathed heater with improved reliability is provided. The sheathed heater of the present invention includes a first metal wire, a first terminal connected to a first end of the first metal wire, a first conductive flexible member connected to the first terminal and connected to a second metal wire, a second terminal connected to a second end of the first metal wire, and a second conductive flexible member connected to the second terminal and connected to a third metal wire, wherein the first conductive flexible member and the second conductive flexible member are arranged adjacent to each other.