公开(公告)号：US20240178049A1

公开(公告)日：2024-05-30

申请号：US18284928

申请日：2022-02-04

Applicant: NHK Spring Co., Ltd.

Inventor： Naoya Kida ,  Jun Futakutiya ,  Daisuke Fujino ,  Naoya Aikawa ,  Keiko Wada ,  Aya Nakajima

IPC: H01L21/687 ,  H05B3/18 ,  H05B3/30

CPC classification number: H01L21/68785 ,  H05B3/18 ,  H05B3/30 ,  H05B2203/002 ,  H05B2213/07

Abstract: A placement board includes: a main body unit configured to form a flow channel for circulation of a medium for heat exchange and place a workpiece thereon, the main body unit being made of a metallic material; and a heater provided in an outer edge region of the main body unit. A temperature difference between the outer edge region and an inner region of the main body unit at a surface of the main body unit where the workpiece is placed is 20° C. or more in a state where the medium has been caused to circulate through the flow channel.