公开(公告)号：US10705030B2

公开(公告)日：2020-07-07

申请号：US14221319

申请日：2014-03-21

Applicant: NIKON CORPORATION

Inventor： Takashi Watanabe

IPC: G01N23/04 ,  G01N23/046 ,  G01N23/18 ,  H01J35/06 ,  H01J35/08 ,  H01J35/12 ,  H01J35/14 ,  H01J35/16 ,  H05G1/04 ,  H05G1/06 ,  H05G1/02 ,  H01J35/04

Abstract: Provided is an x-ray device capable of suppressing reduction in detection precision. The X-ray device irradiates x-rays on an object and detects X-rays that pass through the object. The X-ray device comprises: an X-ray source that emits X-rays; a stage that holds the object; a detection device that detects at least some of the x-rays that have been emitted from the X-ray source and have passed through the object; a chamber member that forms an internal space wherein the X-ray source, the stage, and the detection device are arranged; and a partitioning section that separates the internal space into a first space wherein the X-ray source is arranged and a second space wherein the detection device is arranged.

公开(公告)号：US10393678B2

公开(公告)日：2019-08-27

申请号：US14935837

申请日：2015-11-09

Applicant: NIKON CORPORATION ,  NIKON METROLOGY NV

Inventor： Takashi Watanabe ,  Daniel Hilton ,  Sam Hawker

IPC: G01N23/04 ,  G01N23/046 ,  G01N23/06 ,  G01N23/083 ,  G01N23/087 ,  G01V5/00

Abstract: Provided is a device capable of suppressing a drop in detection accuracy, and a manufacturing method of a structure. A detection device is a device that irradiates a subject with X-rays and detects the X-rays transmitting through the subject, and includes an X-ray source that emits X-rays, a table that holds the subject, a detector that detects at least a portion of the transmitted X-rays emitted from the X-ray source and transmitted through the subject, and a first guide device and a second guide device that guide movement of the table in a direction parallel to an optical axis of the X-ray source while supporting the table. In this detection device, a guide plane, which is parallel to the optical axis and is a plane to which the movement of the table is regulated, passes through the inside of a detection region of the transmitted X-rays of the detector.