公开(公告)号：US20220307836A1

公开(公告)日：2022-09-29

申请号：US17641490

申请日：2021-09-06

Applicant: NORTHWESTERN POLYTECHNICAL UNIVERSITY

Inventor： Honglong CHANG ,  Lu TIAN ,  Qiang SHEN

IPC: G01C19/72

Abstract: Disclosed is a chip-level resonant acousto-optic coupling solid-state wave gyroscope based on MEMS technology. A surface acoustic progressive wave mode sensitive structure and a micro-ring resonant cavity optical detection structure are combined in the gyroscope. Through acousto-optic effect, mechanical strain of the device crystal caused by wave vibration of a primary surface acoustic wave and a secondary surface acoustic wave caused by Coriolis force is converted into a variation in the refractive index of an optical waveguide etched on the device, so that the optical signal transmitted in the waveguide diffracts, thereby generating frequency modulation. Meanwhile, a micro-ring resonant cavity using the resonance principle peels off the frequency change introduced by the primary surface acoustic wave, and obtains an output signal containing external angular velocity information. Based on the proportional relationship between the detection resolution and the quality factor of the micro-ring resonant cavity, the order of magnitude of the interface detection resolution is improved, and the performance indicators of the gyroscope are simultaneously optimized in terms of improving sensitivity and resolution, and its precision is improved.

公开(公告)号：US20240053148A1

公开(公告)日：2024-02-15

申请号：US17641481

申请日：2021-09-30

Applicant: NORTHWESTERN POLYTECHNICAL UNIVERSITY

Inventor： Honglong CHANG ,  Lu TIAN ,  Qiang SHEN ,  Ge YANG

IPC: G01C19/72

CPC classification number: G01C19/721

Abstract: Disclosed is a chip-level disc-type acousto-optic standing wave gyroscope including a substrate and a gyroscope structure placed on an upper surface of the substrate; the substrate is in a shape of a circular disc; the gyroscope structure includes an acoustic wave drive module and an optical detection module, the acoustic wave drive module is arranged in a circular shape taking the center of the circular disc as an origin and extending outward radially, and the optical detection module is arranged in the middle of the acoustic wave drive module and is annular; the acoustic wave drive module includes an annular interdigitated transducer, a metal electrode layer group uniformly sputtered on the annular interdigitated transducer, annularly arranged metallic pillars and an annular reflection grating, respectively placed in sequence from center of the disk radially to periphery of the disk; the optical detection module includes a first grating coupler, an optical waveguide at a light source input end, a first coupler, a second coupler, an optical waveguide at a signal output end and a second grating coupler, which are connected in sequence. According to the technical solution of the disclosure, the sensitivity of gyroscope detection can be improved.