公开(公告)号：US20140319373A1

公开(公告)日：2014-10-30

申请号：US14258371

申请日：2014-04-22

Applicant: Nuflare Technology, Inc.

Inventor： Michihiro KAWAGUCHI ,  Kiminobu Akeno ,  Yoshinori Kagawa ,  Yu Asami ,  Keisuke Yamaguchi

IPC: H01J37/30

CPC classification number: H01J37/3002 ,  H01J37/18 ,  H01L21/02 ,  H01L21/67115 ,  H01L21/6719 ,  H01L21/67207 ,  H01L21/67213

Abstract: A charged particle beam drawing apparatus according to one embodiment of the present invention comprises a load lock chamber provided for introducing a target object from the outside and capable of switching an atmosphere state and a vacuum state, a transfer chamber arranged so as to be able to communicate with the load lock chamber and transferring the target object, a soaking chamber arranged so as to be able to communicate with the transfer chamber and having a temperature adjustment container for housing the target object therein and controlling a temperature of the target object with radiation and a temperature adjustment part for controlling a temperature of the temperature adjustment container, and a drawing chamber arranged so as to be able to communicate with the transfer chamber and drawing on the target object at a constant temperature.

Abstract translation: 根据本发明的一个实施例的带电粒子束描绘装置包括：负载锁定室，用于从外部引入目标物体并且能够切换气氛状态和真空状态，传送室被布置成能够 与负载锁定室连通并传送目标物体，均热室布置成能够与传送室连通并具有用于将目标物体容纳在其中的温度调节容器，并用辐射控制目标物体的温度， 用于控制温度调节容器的温度的温度调节部件和布置成能够与传送室连通并在恒定温度下对目标物体进行拉伸的拉伸室。

公开(公告)号：US08987683B2

公开(公告)日：2015-03-24

申请号：US14258371

申请日：2014-04-22

Applicant: NuFlare Technology, Inc.

Inventor： Michihiro Kawaguchi ,  Kiminobu Akeno ,  Yoshinori Kagawa ,  Yu Asami ,  Keisuke Yamaguchi

IPC: H01L21/02 ,  G21K5/08 ,  H01J37/30 ,  H01J37/18

CPC classification number: H01J37/3002 ,  H01J37/18 ,  H01L21/02 ,  H01L21/67115 ,  H01L21/6719 ,  H01L21/67207 ,  H01L21/67213

Abstract: A charged particle beam drawing apparatus according to one embodiment of the present invention comprises a load lock chamber provided for introducing a target object from the outside and capable of switching an atmosphere state and a vacuum state, a transfer chamber arranged so as to be able to communicate with the load lock chamber and transferring the target object, a soaking chamber arranged so as to be able to communicate with the transfer chamber and having a temperature adjustment container for housing the target object therein and controlling a temperature of the target object with radiation and a temperature adjustment part for controlling a temperature of the temperature adjustment container, and a drawing chamber arranged so as to be able to communicate with the transfer chamber and drawing on the target object at a constant temperature.

Abstract translation: 根据本发明的一个实施例的带电粒子束描绘装置包括：负载锁定室，用于从外部引入目标物体并且能够切换气氛状态和真空状态，传送室被布置成能够 与负载锁定室连通并传送目标物体，均热室布置成能够与传送室连通并具有用于将目标物体容纳在其中的温度调节容器，并用辐射控制目标物体的温度， 用于控制温度调节容器的温度的温度调节部件和布置成能够与传送室连通并在恒定温度下对目标物体进行拉伸的拉伸室。

公开(公告)号：US09299531B2

公开(公告)日：2016-03-29

申请号：US14257641

申请日：2014-04-21

Applicant: NUFLARE TECHNOLOGY, INC.

Inventor： Yu Asami ,  Michihiro Kawaguchi

IPC: G01N21/00 ,  H01J37/02 ,  H01J37/317 ,  H01J37/30

CPC classification number: H01J37/026 ,  H01J37/3002 ,  H01J37/3174 ,  H01J2237/31788

Abstract: A mask cover according to one embodiment of the present invention comprises a frame body having an opening at the center, a conductive earth plate installed on the frame body such that its end protrudes into the opening of the frame body, an earth pin provided on the end of the earth plate and electrically connected to the earth plate, and a conductive cover part surrounding the earth pin such that the tip end of the earth pin protrudes and a gap is present between the cover part and the earth pin.

Abstract translation: 根据本发明的一个实施例的掩模罩包括：在中心具有开口的框架体，安装在框架体上的导电接地板，使其端部突出到框体的开口中， 接地板的端部并且电连接到接地板，以及围绕接地引脚的导电覆盖部分，使得接地引脚的尖端突出并且在盖部分和接地引脚之间存在间隙。