公开(公告)号：US20240117487A1

公开(公告)日：2024-04-11

申请号：US18056800

申请日：2022-11-18

Applicant: National Applied Research Laboratories

Inventor： Shu-Ju Tsai ,  Yi-Cheng Lin

IPC: C23C16/26 ,  C23C16/48 ,  C23C16/513 ,  H01L21/02

CPC classification number: C23C16/26 ,  C23C16/48 ,  C23C16/513 ,  H01L21/02115 ,  H01L21/022 ,  H01L21/02274 ,  H01L21/0254 ,  H01L21/02568 ,  H01L21/02595 ,  H01L21/02598

Abstract: A 2D layered thin film structure is disclosed. The 2D layered thin film structure can be applied to the growth of monocrystalline or polycrystalline group III nitrides and other 2D materials. The 2D layered thin film structure can be easily separated from the 2D layered thin film structure growth substrate, so that a single or composite nanopillar array structure formed by the monocrystalline or polycrystalline group III nitride or other 2D materials, or the 2D layered thin film structure can be transferred to any other substrate. In addition, the 2D layered thin film structure has excellent light transmittance, flexibility and component integration.