公开(公告)号：US08943611B2

公开(公告)日：2015-01-27

申请号：US14335515

申请日：2014-07-18

Applicant: National Institute of Standards and Technology

Inventor： Rachel Cannara ,  Christian Long

IPC: G01Q70/02

CPC classification number: G01Q70/02 ,  G01Q10/045

Abstract: A probe module includes a mount; a cantilever disposed on the mount; an electrode disposed on the mount and opposing the cantilever, and a primary fastener disposed on the mount to mechanically separate the cantilever and the electrode at a primary distance. In the probe module, the cantilever is detachably disposed on the mount, the electrode is detachably disposed on the mount, or a combination thereof.

Abstract translation: 探针模块包括安装座; 安装在安装座上的悬臂; 设置在所述安装件上并与所述悬臂相对的电极，以及设置在所述安装件上的主要紧固件，以在所述主要距离上机械地分离所述悬臂和所述电极。 在探针模块中，悬臂可拆卸地设置在安装件上，电极可拆卸地设置在安装件上，或其组合。