公开(公告)号：US08997258B2

公开(公告)日：2015-03-31

申请号：US14286480

申请日：2014-05-23

Applicant: National Institute of Standards and Technology

Inventor： Vladimir Aksyuk ,  Kartik Srinivasan ,  Houxun Miao ,  Ivo W. Rangelow ,  Thomas Michels

IPC: G02B6/26 ,  G01B9/02 ,  G01B11/24 ,  G02F1/035 ,  G02F1/025 ,  G01Q20/02

CPC classification number: G01Q20/02

Abstract: A microscope probe includes a substrate; an optical resonator disposed on the substrate and including an optical resonance property; a displacement member disposed on the substrate and separated from the optical resonator, the displacement member including: a first end disposed distal to the optical resonator; and a second end disposed proximate to the optical resonator; and a coupling member disposed on the substrate and connecting the displacement member to the substrate, wherein the first end is configured to probe a sample and to be displaced in response to a condition of the sample, the displacement member is configured to communicate displacement of the first end to the second end, and the second end is configured to change the optical resonance property in response to displacement of the second end.

Abstract translation: 显微镜探针包括基底; 设置在基板上并包括光学谐振特性的光学谐振器; 位移构件，设置在所述基板上并与所述光学谐振器分离，所述位移构件包括：设置在所述光学谐振器的远侧的第一端; 以及靠近所述光学谐振器设置的第二端; 以及联接构件，其设置在所述基板上并且将所述位移构件连接到所述基板，其中所述第一端被配置为响应于所述样本的状态来探测样本并且被移位，所述位移构件被配置为使所述位移构件 第一端到第二端，并且第二端被配置为响应于第二端的位移来改变光学谐振特性。