公开(公告)号：US5883382A

公开(公告)日：1999-03-16

申请号：US941695

申请日：1997-10-01

Applicant: Norihiro Asada

Inventor： Norihiro Asada

IPC: G01J1/04 ,  G02B26/08 ,  H01J40/14

CPC classification number: G01J1/04 ,  G01J1/0403 ,  G02B26/085 ,  G01J1/0204 ,  G01J1/0266

Abstract: A movable plate 5 and torsion bars 6 are monolithically formed in a semiconductor substrate 2. A flat coil 7 is formed on peripheries of the movable plate 5 while a photodiode 8 is formed on a central portion of the movable plate 5. Permanent magnets 10A, 10B, 11A and 11B are provided on upper and lower spaces of the peripheries of the movable plate 5 while coils 12A and 12B for detecting a displacement angle of the movable plate 5 are provided on lower spaces of the peripheries of the movable plate 5. Flowing a current into the flat coil 7 generates a driving force depending on a relation with magnetic fields induced by the permanent magnets 10A, 10B, 11A and 11B, which makes the movable plate 5 to rotate axially around the torsion bars 6 to vary an orienting direction of an optical axis of the photodiode 8. The displacement angle of the optical axis is detectable by changes in mutual inductances between the flat coil 7 and the detection coils 12A and 12B, namely, changes in induction voltages of the detection coils 12A and 12B.

Abstract translation: 可移动板5和扭力杆6在半导体衬底2中单片地形成。在可移动板5的中心部分形成光电二极管8的同时，在可动板5的周边形成有平面线圈7.永磁体10A， 10B，11A和11B设置在可移动板5的周边的上部和下部空间中，而用于检测可动板5的位移角度的线圈12A和12B设置在可动板5的周边的下部空间上。流动 进入扁平线圈7的电流产生取决于与由永磁体10A，10B，11A和11B引起的磁场的关系的驱动力，这使得可动板5围绕扭杆6轴向旋转以改变定向方向 光轴的光轴的位移角可以通过扁平线圈7和检测线圈12A和12B之间的互感的变化来检测，即感应变化 检测线圈12A和12B的电压。

公开(公告)号：US5872496A

公开(公告)日：1999-02-16

申请号：US505321

申请日：1995-11-01

Applicant: Norihiro Asada ,  Masayoshi Esashi

Inventor： Norihiro Asada ,  Masayoshi Esashi

IPC: H01H49/00 ,  B81B3/00 ,  B81C1/00 ,  H01H1/20 ,  H01H50/00 ,  H01H51/22 ,  H01H51/24

CPC classification number: H01H50/005 ,  H01H1/20 ,  H01H2050/007 ,  H01H2050/025 ,  H01H2059/0054

Abstract: A slim-type small size electromagnetic relay is made using semiconductor manufacturing techniques to form a silicon substrate 2 having a planar movable plate 5 and a torsion bar 6 for axially supporting the movable plate 5 formed integrally therewith, with a planar coil 7 provided on an upper face of the movable plate 5 and a movable contact 9 provided on a lower face. Glass substrates 3, 4 are provided on upper and lower faces of the silicon substrate 2, with fixed contact 11 contactable with the movable contact 9 provided on the lower glass substrate 4. Permanent magnets 13A, 13B and 14A, 14B for producing a magnetic field at the planar coil 7 are fixed to the glass substrates 3, 4. Rotation of the movable plate 5 against the torsion force of the torsion bar 6 is controlled by passing a current through the planar coil 7 to produce a magnetic force, thereby causing contact or separation of the movable contact 9 and the fixed contact 11.

Abstract translation: PCT No.PCT / JP94 / 02063 Sec。 371日期：1995年11月1日 102（e）1995年11月1日PCT PCT 1994年12月8日PCT公布。 公开号WO95 / 17760 PCT 日期：1995年6月29日使用半导体制造技术制造薄型小型电磁继电器，以形成具有平面可动板5和用于轴向支撑与其一体形成的可动板5的扭杆6的硅基板2， 设置在可动板5的上表面上的线圈7和设置在下表面上的可动触点9。 玻璃基板3,4设置在硅基板2的上表面和下表面上，固定触点11与设置在下玻璃基板4上的可动触头9接触。用于产生磁场的永磁体13A，13B和14A，14B 在平面线圈7处固定在玻璃基板3,4上。通过使电流通过平面线圈7产生磁力来控制可动板5与扭杆6的扭转力的旋转，从而形成接触 或分离可动触点9和固定触点11。

公开(公告)号：US20080285107A1

公开(公告)日：2008-11-20

申请号：US11890608

申请日：2007-08-07

Applicant: Norihiro Asada ,  Kenichi Kagawa

Inventor： Norihiro Asada ,  Kenichi Kagawa

IPC: G02B26/08

CPC classification number: G02B26/085

Abstract: The present invention provides an electromagnetically actuating optical deflecting elements which can be manufactured out of reduced number of components and are capable of being actuated at lower frequencies and at wider deflecting angles without causing mechanical influences of the metal wiring on beams of the optical deflecting element.For that purpose, the electromagnetically actuating optical deflecting element comprises: a movable part having a light reflecting plane and a coil; a base component having a magnetic field generating means; and a pair of beams which axially support said movable part on to the base component, The movable part is actuated by an electromagnetic force generated by an electric current flowing through the coil and the magnetic field generating means. The beams 108 are constituted by one material having functions to perform as conductors for supplying electric current to the coil, to support the movable part, to perform as springs for returning the movable part to a starting position.

Abstract translation: 本发明提供了一种电磁致动的光学偏转元件，其可以由数量较少的部件制造，并且能够以较低的频率和较宽的偏转角度被致动，而不会引起金属布线对光学偏转元件的光束的机械影响。 为此，电磁致动光学偏转元件包括：具有光反射面和线圈的可动部; 具有磁场发生装置的基座部件; 以及一对梁，其将所述可动部件轴向地支撑在基部部件上。可动部分由通过线圈和磁场产生装置的电流产生的电磁力致动。 梁108由具有作为向线圈提供电流的导体的功能的一种材料构成，以支撑可移动部分，作为将可动部分返回到起始位置的弹簧来执行。

公开(公告)号：US07442560B2

公开(公告)日：2008-10-28

申请号：US10581852

申请日：2004-11-30

Applicant: Norihiro Asada

Inventor： Norihiro Asada

IPC: G01R31/26

CPC classification number: H01R13/2414 ,  H01R13/035

Abstract: In order to provide an anisotropic conductive sheet which can be applied to more finely and more narrowly pitched electrodes and also to provide spring electrodes applied for the anisotropic conductive sheet, the spring electrodes manufactured as follows. A part having a bending leaf spring shape is formed out of a monocrystal silicon by anisotropic etching and gold is plated on the surface of the part so as to obtain a silicon spring electrode 1. The silicon spring electrodes 1 are inserted in through holes formed on a silicone rubber sheet and fixed to the through holes.

Abstract translation: 为了提供可应用于更精细和更窄的俯仰电极并且还提供用于各向异性导电片的弹簧电极的各向异性导电片，如下制造的弹簧电极。 通过各向异性蚀刻由单晶硅形成具有弯曲板簧形状的部分，并且在部件的表面上镀金，以获得硅弹簧电极1。 硅弹簧电极1插入形成在硅橡胶片上的通孔中并固定到通孔。

公开(公告)号：US06246503B1

公开(公告)日：2001-06-12

申请号：US09538415

申请日：2000-03-30

Applicant: Norihiro Asada ,  Koichi Futsuhara

Inventor： Norihiro Asada ,  Koichi Futsuhara

IPC: G02B2608

CPC classification number: G01V8/10 ,  G01V8/12 ,  G01V8/20 ,  G01V8/26

Abstract: A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle introduces into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.

Abstract translation: 从激光束产生装置201产生的激光束被反射在半导体反射镜检流计102上。被检查的区域105被反射的激光束106扫描。通过要检查的区域105的激光束106被接收到 光接收装置阵列130.由光接收装置阵列130产生的输出信号中包括的脉冲串由信号处理电路206监视。如果障碍物被引入要检查的区域105中，并且在 脉冲串，通过使用脉冲缺陷检测电路204检测不足。上述结构提供了能够降低制造成本而不危及故障保护性的光阻挡装置。

公开(公告)号：US5912608A

公开(公告)日：1999-06-15

申请号：US776457

申请日：1997-01-14

Applicant: Norihiro Asada

Inventor： Norihiro Asada

IPC: G02B26/10 ,  B06B1/04 ,  G02B26/08 ,  H02K33/18 ,  G02B7/18 ,  G01R13/38

CPC classification number: G02B26/085 ,  G02B26/101 ,  H02K33/18

Abstract: The present invention relates to a planar type electromagnetic actuator of two axis construction, having two movable plates (12A, 12B) with pivotal supports at right angles to each other. A pair of static magnetic field generating devices (4, 5) are arranged facing each other on either side of the movable plates (12A, 12B), and aligned with one diagonal direction of the movable plates (12A, 12B) so that a magnetic field acts on the movable plates (12A, 12B). A magnetic force due to the mutual action with a current flowing through drive coils (15A, 15B), acts on the movable plates (12A, 12B), to thus drive the movable plates (12A, 12B). As a result, the number of components for the magnetic field generating devices can be reduced, the construction of the electromagnetic actuator simplified, and construction costs reduced.

Abstract translation: PCT No.PCT / JP96 / 01149 Sec。 371日期1997年1月14日 102（e）日期1997年1月14日PCT 1996年4月26日PCT PCT。 公开号WO96 / 37943 日期：1996年11月28日本发明涉及一种双轴结构的平面型电磁致动器，具有两个具有彼此成直角的枢轴支撑的可动板（12A，12B）。 一对静磁场产生装置（4,5）相对于可动板（12A，12B）的任一侧彼此相对布置，并与可移动板（12A，12B）的一个对角线方向对准，使得磁 场作用在可动板（12A，12B）上。 由于与流过驱动线圈（15A，15B）的电流相互作用的磁力作用在可动板（12A，12B）上，从而驱动可动板（12A，12B）。 结果，可以减少用于磁场产生装置的部件的数量，简化了电磁致动器的构造，并且降低了施工成本。

公开(公告)号：US06404313B2

公开(公告)日：2002-06-11

申请号：US09758528

申请日：2001-01-11

Applicant: Norihiro Asada

Inventor： Norihiro Asada

IPC: G02B718

CPC classification number: G02B26/101 ,  B81B3/0062 ,  B81B2201/042 ,  G02B7/1821 ,  G02B26/085 ,  H01H50/005

Abstract: An electromagnetic actuator includes an external movable plate formed integrally with a semiconductor substrate. A first torsion bar movably supports the movable plate with respect to the semiconductor substrate. An internal movable plate is disposed inside the external movable plate. A second torsion bar rotatably supports the internal movable plate relative to the external movable plate, and is positioned at a right angle relative to the first torsion bar; and further includes a single turn first driving coil extending around the external movable plate; a single turn second driving coil extending around the internal movable plate, and which is connected in series with the first driving coil; magnetic field generating means for applying a magnetic field to the first and second driving coils; and an optical element having an optical axis and located on the internal movable plate. A current is caused to flow through the first and second driving coils to produce a force corresponding to each coil and to each plate, the external and internal movable plates displacing in response to the corresponding coil forces applied thereto and thus vary the direction of displacement of said optical axis. In one embodiment, the single turn first and second driving coils are closed-looped. A method of manufacturing the electromagnetic actuator includes forming an aluminum layer on the semiconductor substrate by aluminum deposition; and forming the driving coils from the aluminum layer through photolithography and aluminum etching. Other embodiments are disclosed.

Abstract translation: 电磁致动器包括与半导体基板一体形成的外部可动板。 第一扭杆相对于半导体基板可移动地支撑可动板。 内部可移动板设置在外部可动板的内部。 第二扭杆相对于外部可动板可旋转地支撑内部可移动板，并且相对于第一扭杆以直角定位; 并且还包括围绕所述外部可移动板延伸的单匝第一驱动线圈; 围绕所述内部可移动板延伸并与所述第一驱动线圈串联连接的单匝第二驱动线圈; 用于向第一和第二驱动线圈施加磁场的磁场产生装置; 以及具有光轴并位于内部可移动板上的光学元件。 引起电流流过第一和第二驱动线圈以产生对应于每个线圈和每个板的力，外部和内部可移动板响应于施加到其上的相应线圈力而移位，并且因此改变位移方向 所述光轴。 在一个实施例中，单转第一和第二驱动线圈是闭环的。 制造电磁致动器的方法包括通过铝沉积在半导体衬底上形成铝层; 以及通过光刻和铝蚀刻从铝层形成驱动线圈。 公开了其他实施例。

公开(公告)号：US06232861B1

公开(公告)日：2001-05-15

申请号：US08793386

申请日：1997-04-25

Applicant: Norihiro Asada

Inventor： Norihiro Asada

IPC: G02B718

CPC classification number: G02B26/101 ,  B81B3/0062 ,  B81B2201/042 ,  G02B7/1821 ,  G02B26/085 ,  H01H50/005

Abstract: An electromagnetic actuator for driving a movable plate equipped with an optical element such as a mirror on the basis of the operation principle of a galvanometer. The structure of the movable plate is simplified, and a driving coil and a wiring are formed by aluminium vapor deposition to improve durability. When an impact brings the movable plate outside the allowable rocking range of the movable plate, a stopper prevents excessive displacement of the movable plate to thereby prevent destruction of a torsion bar that supports the movable plate. Moreover, electrical connection in the torsion bar is eliminated to prolong the service life, and a production process is simplified to reduce a production cost.

Abstract translation: 一种电磁致动器，用于根据检流计的工作原理驱动装有诸如反射镜的光学元件的可动板。 可动板的结构简化，通过铝蒸镀法形成驱动线圈和配线，提高耐久性。 当冲击将可动板移动到可动板的允许摇摆范围之外时，止动件防止可动板的过度位移，从而防止支撑可动板的扭力杆的破坏。 此外，消除了扭杆中的电连接以延长使用寿命，并且简化了生产过程以降低生产成本。

公开(公告)号：US06185028B2

公开(公告)日：2001-02-06

申请号：US09539027

申请日：2000-03-30

Applicant: Norihiro Asada ,  Koichi Futsuhara

Inventor： Norihiro Asada ,  Koichi Futsuhara

IPC: G02B2608

CPC classification number: G01V8/10 ,  G01V8/12 ,  G01V8/20 ,  G01V8/26

Abstract: A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle intrudes into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.

公开(公告)号：US6046834A

公开(公告)日：2000-04-04

申请号：US930077

申请日：1997-11-07

Applicant: Norihiro Asada ,  Koichi Futsuhara

Inventor： Norihiro Asada ,  Koichi Futsuhara

IPC: G01V8/10 ,  G01V8/12 ,  G01V8/20 ,  G01V8/26 ,  G02B26/08

CPC classification number: G01V8/10 ,  G01V8/12 ,  G01V8/20 ,  G01V8/26

Abstract: A laser beam generated from a laser beam generating means 201 is reflected on a semiconductor mirror galvanometer 102. A region 105 to be inspected is scanned with the reflected laser beam 106. The laser beam 106 passing through the region 105 to be inspected is received by a light receiving device array 130. A pulse train included in an output signal produced from the light receiving device array 130 are monitored by a signal processing circuit 206. If an obstacle intrudes into the region 105 to be inspected and induces a pulse deficiency in the pulse train, the deficiency is detected by use of a pulse deficiency detecting circuit 204. A constitution mentioned above provides an optical barrier apparatus capable of reducing manufacturing costs without endangering a fail-safe property.

Abstract translation: PCT No.PCT / JP97 / 00742 Sec。 371日期：1997年11月7日 102（e）日期1997年11月7日PCT 1997年3月10日PCT公布。 出版物WO97 / 33186 日期1997年9月12日从激光束产生装置201产生的激光束在半导体反射镜电流计102上被反射。要被检查的区域105用反射激光束106扫描。激光束106通过区域105到 由光接收装置阵列130接收检查。由光接收装置阵列130产生的输出信号中包括的脉冲串由信号处理电路206监视。如果障碍物进入要检查的区域105并且引起 脉冲串中的脉冲不足，通过使用脉冲缺陷检测电路204来检测不足。上述结构提供了能够降低制造成本而不危及故障安全性的光阻挡装置。