公开(公告)号：US20180010237A1

公开(公告)日：2018-01-11

申请号：US15206163

申请日：2016-07-08

Applicant: Norsk Titanium AS

Inventor： Trond FORSETH ,  Brede VIGDAL ,  Arne RAMSLAND ,  Svein STEINSVIK ,  Jorgen HAUGEN

IPC: C23C14/24 ,  C23C14/50

Abstract: Provided is a chamber system for solid free form fabrication, the chamber system having a deposition chamber, a service chamber and one or more loading/unloading chambers. The chamber system allows for a more efficient and cost effective process to service the deposition apparatus, load holding substrates, and unload workpieces without requiring having to adjust the atmosphere in the deposition chamber.

公开(公告)号：US20200340099A1

公开(公告)日：2020-10-29

申请号：US16927164

申请日：2020-07-13

Applicant: Norsk Titanium AS

Inventor： Trond FORSETH ,  Brede VIGDAL ,  Arne RAMSLAND ,  Svein STEINSVIK ,  Jorgen HAUGEN

IPC: C23C14/24 ,  B22F3/105 ,  C23C14/50

Abstract: Provided is a chamber system for solid free form fabrication, the chamber system having a deposition chamber, a service chamber and one or more loading/unloading chambers. The chamber system allows for a more efficient and cost effective process to service the deposition apparatus, load holding substrates, and unload workpieces without requiring having to adjust the atmosphere in the deposition chamber.